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Thermal-driving uniaxial drawing/compressive deformation device for scanning/transmission electron microscope

A uniaxial tension and compression deformation technology, applied in the direction of applying stable tension/pressure to test the strength of materials, can solve the problems of complex processing technology and high cost, and achieve the effect of simple control method, reliable performance and simple structure

Inactive Publication Date: 2015-07-08
BEIJING UNIV OF TECH
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  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0008] Aiming at the problems of complex processing technology and high cost in the prior art, the present invention provides a micro-nano-scale heat-driven in-situ stretching / compression deformation technology based on V-beam scanning / transmission electron microscopy with simple preparation method

Method used

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  • Thermal-driving uniaxial drawing/compressive deformation device for scanning/transmission electron microscope
  • Thermal-driving uniaxial drawing/compressive deformation device for scanning/transmission electron microscope
  • Thermal-driving uniaxial drawing/compressive deformation device for scanning/transmission electron microscope

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Embodiment Construction

[0042] The present invention will be further described below in conjunction with accompanying drawing:

[0043] Choose double-sided polished 100μm thick aluminum foil, copper foil or molybdenum foil, after cleaning and drying, spin-coat photoresist positive resist on the front and back sides, and then bake the glue, and align the prepared photoresist plate with the front side of the copper foil for exposure. After immersing in the developing solution to remove the glue, the driving part pattern is obtained. The V-shaped beam of the driving part 3 has a width of 100 μm, a length of 700 μm, and an angle of 15° to the vertical direction of the stretching. The width of the central support part 2 is 1.5 mm, the length of the central support part 2 along the stretching direction is 500 μm, the width is 200 μm, and the distance between the central support part 2 along the stretching direction is 30 μm. Phosphoric acid, acetic acid and deionized water are prepared as an etching soluti...

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Abstract

The invention discloses a thermal-driving uniaxial drawing / compressive deformation device for a scanning / transmission electron microscope, and belongs to the field of material mechanical property-microscopic structure integrated in situ representation instrument equipment. The integral research on the micro-nano scale material deformation and microscopic structure and physical property evolution is realized. A scanning electron microscope warming table or a transmission electron heating sample rod is used for heating a metal V-shaped beam after corrosion processing, so that the V-shaped beam is thermally expanded. The V-shaped beam is composed of a plurality of thin beams in symmetric structures, the single beam is thermally expanded so as to be bent and deformed under the stress induction; the V-shaped beam can realize the uniaxial deformation of a sample due to the symmetric structure of the thin beams. The uniaxial drawing and uniaxial compressing of the sample can be realized through the change of a geometric structure of the V-shaped beam. The output force and the displacement of the V-shaped beam and the sample deformation rate are regulated through the controlling on the included angle of the V-shaped beam, the three-dimensional geometric size, the heating temperature and the rate. Moreover, the output force of the stress is regulated as drawing force or compressing force through the controlling on the positive and negative of the included angle of the V-shaped beam.

Description

Technical field: [0001] The invention relates to a heat-driven uniaxial tension / compression deformation device for a scanning / transmission electron microscope. Combining with a scanning / transmission electron microscope, it can realize the in-situ observation of the evolution of the nanometer / atomic scale microstructure during the material deformation process, and at the same time through Scanning / transmission electron microscope observation provides real-time sample strain information, which belongs to the field of in-situ characterization equipment for integrated mechanical properties of materials and microstructures. Background technique: [0002] When the characteristic scale of the material is as small as the micro-nano scale, the strong size effect makes its mechanical and physical properties significantly different from those of macroscopic materials. Understand the physical and microstructural mechanisms corresponding to various mechanical performance parameters of ma...

Claims

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Application Information

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IPC IPC(8): G01N3/08
Inventor 韩晓东王晓冬毛圣成孙世铎张剑飞臧科涛栗晓晨张泽
Owner BEIJING UNIV OF TECH
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