Silica nanoparticle brick array polarizing beam splitter
A polarizing beam splitter and silicon nano-brick technology, which is applied in the direction of polarizing components, can solve the problems that cannot meet the development trend of photonic devices, is not suitable for optical integration, and is expensive, and achieves light weight, compact structure, and mature and simple manufacturing process. Effect
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Embodiment 1
[0032] Such as Figure 1-2 As shown, a silicon nanobrick array polarizing beam splitter includes a transparent substrate and an array of silicon nanobricks uniformly distributed on the transparent substrate, the silicon nanobricks are cuboids, and the arrangement direction of the nanobricks is the same; When incident, light with polarization directions along the long and short sides of the nanobricks is reflected and transmitted, respectively.
[0033] The working wavelength range of the silicon nano-brick array polarization beam splitter is 1460nm-1625nm.
[0034] The substrate material is quartz glass, and the silicon nano-brick material is silicon film.
[0035] The length, width and height of the silicon nano bricks are both sub-wavelength.
[0036] The silicon nano brick has a length of 400nm, a height of 500nm and a width of 180-245nm.
[0037] The preparation method of the silicon nano-brick array polarizing beam splitter is a projection photolithography method or an...
Embodiment 2
[0040] This embodiment selects the dominant wavelength λ in the communication band 0 =1547.5nm, the specific structural parameters of the silicon nanobrick polarizing beam splitter are: nanobrick periodic size C=690nm, nanobrick long axis dimension L=400nm, nanobrick short axis dimension W=220nm, nanobrick height H=500nm. After the xyz coordinate system is established on the nanobrick layer, its long axis is along the x direction, its short axis is along the y direction, and the incident direction is the z direction. When light waves containing multiple polarization states are incident on the silicon nanobrick polarizing beam splitter, the linearly polarized light polarized along the y direction passes through the polarizing beam splitter, while the linearly polarized light polarized along the x direction is reflected, thereby achieving polarization Spectral effect.
[0041] According to the parameters in this embodiment, the polarization splitting effect of the silicon nanob...
Embodiment 3
[0043] This embodiment selects the dominant wavelength λ in the communication band 0 =1460nm, the specific structural parameters of the silicon nanobrick polarizing beam splitter are: nanobrick period size C=690nm, nanobrick long axis dimension L=400nm, nanobrick short axis dimension W=180nm, nanobrick height H=500nm. After the xyz coordinate system is established on the nanobrick layer, its long axis is along the x direction, its short axis is along the y direction, and the incident direction is the z direction. When light waves containing multiple polarization states are incident on the silicon nanobrick polarizing beam splitter, the linearly polarized light polarized along the y direction passes through the polarizing beam splitter, while the linearly polarized light polarized along the x direction is reflected, thereby achieving polarization Spectral effect.
[0044] The silicon nanobrick polarization beam splitter designed according to the parameters in this embodiment h...
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