A preparation method of high photocurrent pb(zr0.52-x, cox, ti0.48)o3-δ thin film
A current generation and thin film technology, which is applied in the field of ferroelectric thin film material preparation, can solve the problems of small photoelectric current and low photoelectric conversion ability of lead zirconate titanate
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specific Embodiment approach 1
[0015] Specific embodiment 1: This embodiment has high photocurrent Pb(Zr 0.52-x , Co x , Ti 0.48 )O 3-δ The preparation method of the film is realized by the following steps:
[0016] 1. The molar ratio is (1~1.15): 0.48: (0.52-x): x Weigh lead acetate, tetrabutyl titanate, zirconium propoxide and cobalt nitrate as raw materials;
[0017] 2. Add the lead acetate in the raw materials to ethylene glycol methyl ether, heat and stir uniformly to obtain a mixed solution. After the mixed solution is cooled to room temperature, add tetrabutyl titanate, zirconium propoxide and cobalt nitrate, and stir for 15-25 minutes. Add ethylene glycol methyl ether to obtain Pb(Zr 0.52-x , Co x , Ti 0.48 )O 3-δ Precursor sol
[0018] 3. The Pb(Zr 0.52-x , Co x , Ti 0.48 )O 3-δ The precursor sol is dropped on the substrate, and the substrate surface is evenly coated and placed on a homogenizer for homogenization treatment to obtain a wet film. The wet film is placed on a hot plate furnace at 420-460°C fo...
specific Embodiment approach 2
[0021] Specific embodiment two: This embodiment is different from specific embodiment one in that the concentration of lead acetate in the mixed solution described in step two is 0.4-0.7 mol / L. Other steps and parameters are the same as in the first embodiment.
specific Embodiment approach 3
[0022] Specific embodiment three: This embodiment is different from specific embodiment one or two in that in step three, the wet film is placed on a hot plate furnace at 450° C. for pre-burning for 3 minutes. Other steps and parameters are the same as those in the first or second embodiment.
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