Gold nanoparticle surface plasmon polariton-based crystalline silicon heterojunction with intrinsic thin-layer (HIT) solar cell
A solar cell, gold nanoparticle technology, applied in circuits, photovoltaic power generation, electrical components, etc., to achieve high short-circuit current, promote scattering and absorption, and improve photoelectric conversion efficiency.
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[0020] The present invention adopts plasma enhanced chemical vapor deposition method (including capacitive coupling and inductively coupled plasma) to prepare intrinsic and p-type a-Si:H. Generally, intrinsic amorphous silicon and p-type amorphous silicon are grown in two vacuum chambers; intrinsic amorphous silicon uses SiH 4 +H 2 As the reactive gas, while the p-type emitter junction uses SiH 4 +H 2 +B 2 H 6 as a reactive gas. After preparing the emitter junction p-a-Si:H, the sample is sent to the magnetron sputtering chamber through a vacuum transfer system, and a discontinuous ultra-thin gold film (5-10) is deposited on the surface of the emitter junction by controlling the magnetron sputtering process. Nanometer), and then directly perform the subsequent annealing process in the vacuum chamber to make the gold film curl into nanoparticles, and obtain the uniform distribution of Au-NPs on the p-a-Si:H layer film. Then, the transparent conductive film and the front a...
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