Controlling and monitoring method for gases in vacuum cabin
A vacuum chamber and vacuum chamber technology, applied in the field of vacuum chamber gas control and monitoring, can solve the problems of low production efficiency, long vacuuming time, large volume, etc., and achieve the effect of improving production efficiency and preventing insecurity
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specific Embodiment approach 1
[0017] Specific implementation mode one: the following combination figure 1 and figure 2 Describe this embodiment, the vacuum chamber gas control and monitoring method described in this embodiment, the specific process of the gas control and monitoring method is:
[0018] Step 1. Turn on the vacuum pump V 1 , pump out the gas in the vacuum chamber A and the vacuum chamber B;
[0019] Step 2. Turn on the sampling pump V 2 , to calibrate the water and oxygen components of argon;
[0020] Step 3. Determine whether the argon water and oxygen composition to be charged has reached the set value, if yes, execute step 4, otherwise return to step 2; the set value of the argon water and oxygen composition is: volume fraction Ar≥ 99.999×10 -2 , O 2 ≤2ppm,H 2 O≤4ppm;
[0021] Step 4, filling argon into the vacuum chamber A and the vacuum chamber B at the same time;
[0022] Step 5. Determine whether the water and oxygen composition of the gas in the vacuum chamber A reaches the ...
specific Embodiment approach 2
[0027] Specific implementation mode two, the following combination figure 1 Describe this embodiment, this embodiment will further explain Embodiment 1, the specific process of extracting the gas in the vacuum chamber A and vacuum chamber B described in step 1 is:
[0028] Step 1-1, open the solenoid valve J 1 , through the filter f 1 Evacuate the gas in the vacuum chamber A;
[0029] Step 1-2, using pressure sensor Y1 1 / Y1 2 Detect the gas in the vacuum chamber A, and judge whether the vacuum degree of the gas in the vacuum chamber A reaches the working vacuum degree, if yes, perform steps 1-3, if not, repeat steps 1-2;
[0030] Step 1-3, close the solenoid valve J 1 , open the solenoid valve J 2 , through the filter f 1 Evacuate the gas in the vacuum chamber B;
[0031] Step 1-4, using pressure sensor Y2 1 / Y2 2 Detect the gas in the vacuum chamber B, and judge whether the vacuum degree of the gas in the vacuum chamber B reaches the working vacuum degree, if so, p...
specific Embodiment approach 3
[0033] Specific implementation mode three, the following combination figure 1 Describe this embodiment, this embodiment will further explain Embodiment 2, the specific process of calibrating the water and oxygen components of argon described in step 2 is:
[0034] Step 2-1, open the solenoid valve J 11 , argon through the pressure gauge Z 1 and solenoid valve J 11 Charge flow regulating valve T 1 ;
[0035] Step 2-2, open the solenoid valve J 12 , the calibration gas passes through the solenoid valve J 12 Charge flow regulating valve T 1 ;
[0036] Step 2-3, through the flow regulating valve T 1 The argon and calibration gas pass through the filter f 4 Filling the Water Content Analyzer I 1 ;
[0037] Step 2-4, through water content analyzer I 1 The argon and calibration gas pass through the flow regulating valve T 2 Charge Oxygen Analyzer I 2 ;
[0038] Step 2-5, through the oxygen content analyzer I 2 The argon and calibration gas pass through the sampling pu...
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