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Tetramethylammonium hydroxide developing waste liquid regeneration system and regeneration method

A tetramethylammonium hydroxide and regeneration system technology, applied in chemical instruments and methods, water/sewage multi-stage treatment, water/sludge/sewage treatment, etc., can solve problems such as voltage increase and electrode service life reduction , to achieve the effect of reducing pressure, reducing recycling cost and saving cost

Active Publication Date: 2018-04-20
HANGZHOU GREENDA CHEM
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0006] But, the method of patent document CN 101111804A needs to measure the concentration of tetraalkylammonium and the content of metal ion impurity in the developing waste liquid, and the content of each metal ion impurity is less than 50ppm with respect to the amount of tetraalkylammonium, just can delicate treatment carry out Recycling; when the content of at least one metal ion impurity is higher than 50ppm relative to the amount of tetraalkylammonium, it cannot be directly refined, because the high content of metal ion impurities will reduce the service life of the electrodes in the electrolysis process, and the electrolytic cell In this case, the developer needs to be discarded, or diluted with new unused tetraalkylammonium hydroxide developer solution, so that the relative content of each metal ion can reach the standard of less than 50ppm, and the dilution process should be refined. The developer waste liquid is regenerated into a recyclable tetraalkylammonium hydroxide developer

Method used

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  • Tetramethylammonium hydroxide developing waste liquid regeneration system and regeneration method

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Experimental program
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Effect test

Embodiment 1

[0035] Such as figure 1 The shown use carbon dioxide gas for neutralization and recycling recovery system.

[0036] The regeneration system includes several feed pumps, neutralization separation towers, adsorption towers, cation exchange resin towers, anion exchange resin towers, and purification treatment towers. The neutralization separation tower, adsorption tower, cation exchange resin tower, anion exchange resin tower and purification There is a set of treatment towers each. The neutralization separation tower, adsorption tower, cation exchange resin tower, anion exchange resin tower and purification treatment tower are connected in turn through a feed pipe with a control valve. The regeneration system is used for tetramethyl hydrogen. The method of regeneration of ammonium oxide developing waste liquid is carried out as follows:

[0037] (1) Acid neutralization-separation: carbon dioxide gas and tetramethylammonium hydroxide developing waste liquid with a flow rate of 120mL / m...

Embodiment 2

[0042] Such as figure 2 The shown use inorganic acid solution for neutralization, recycling and recycling system.

[0043] The regeneration system includes several feed pumps, neutralization separation towers, adsorption towers, cation exchange resin towers, anion exchange resin towers, and purification treatment towers. The neutralization separation tower, adsorption tower, cation exchange resin tower, anion exchange resin tower and purification There is a set of treatment towers each. The neutralization separation tower, adsorption tower, cation exchange resin tower, anion exchange resin tower and purification treatment tower are connected in turn through a feed pipe with a control valve. The regeneration system is used for tetramethyl hydrogen. The method of regeneration of ammonium oxide developing waste liquid is carried out as follows:

[0044] (1) Acid neutralization-separation: a sulfuric acid solution with a concentration of 1.2 mol / L is added to the neutralization tower...

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Abstract

The invention relates to a regeneration system and regeneration method of tetramethylammonium hydroxide developing waste liquid. The system includes several feeding pumps, neutralization and separation device, adsorption device, cation exchange device, anion exchange device and purification treatment device, and each of the neutralization separation device, adsorption device, cation exchange device, anion exchange device and purification treatment device At least one set is provided, and the neutralization separation device, adsorption device, cation exchange device, anion exchange device and purification treatment are sequentially connected through a material pipe with a control valve, through which the system can regenerate high-purity tetramethyl The ammonium hydroxide developer achieves the purpose of energy saving and environmental protection, and at the same time reduces the pressure of wastewater discharge in semiconductor factories, saving the cost of wastewater treatment for the factory, so as to achieve the purpose of effective recycling of resources.

Description

Technical field [0001] The invention relates to a waste liquid regeneration system and method, in particular to a tetramethylammonium hydroxide developing waste liquid regeneration system and a regeneration method. Background technique [0002] Electronic grade Tetramethyl Ammonium Hydroxide (TMAH) developer is widely used in liquid crystal displays (TFT-LCD), IC, printed substrates and other manufacturing processes, including silicon wafers and other substrates to form positive or negative types The photoresist film is exposed to the photoresist film in a predetermined pattern through a mask, and then the exposed photoresist is cleaned with tetramethylammonium hydroxide developer TMAH, and then the etching process is performed. The peeling liquid peels off the insoluble photoresist film on the substrate to achieve the desired pattern. [0003] In the above-mentioned development process, the tetramethylammonium hydroxide TMAH development waste liquid containing the photoresist liq...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): C02F9/04G03F7/30
Inventor 邢攸美
Owner HANGZHOU GREENDA CHEM