Device and method for realizing thick silver film as surface reinforced Raman scattering substrate by physical method

A surface-enhanced Raman and physical method technology, applied in Raman scattering, measuring devices, sputtering coating, etc., can solve the problems of insufficient enhancement effect and harsh preparation conditions, and achieve strong enhancement effect and convenient preparation technology Effect

Inactive Publication Date: 2016-04-20
LONGYAN UNIV
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Problems solved by technology

[0014] Although the silver prepared by the oblique angle evaporation method (OAD) and the template method (such as AAO anodized aluminum template) have the SERS effect, they both prove that physical methods can realize the thick silver film as the SERS substrate, and both solve the problem that the preparation conditions of the PVD method are relatively low. Harsh problems, but there are certain shortcomings, the enhanced effect is not good enough, and it also increases the problems of template synthesis (such as AAO anodized aluminum template method) and equipment specialization or equipment transformation (OAD oblique evaporation method)
Therefore, as long as further in-depth research, the shortcomings of the above methods can be properly corrected

Method used

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  • Device and method for realizing thick silver film as surface reinforced Raman scattering substrate by physical method
  • Device and method for realizing thick silver film as surface reinforced Raman scattering substrate by physical method
  • Device and method for realizing thick silver film as surface reinforced Raman scattering substrate by physical method

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Embodiment

[0048] Deposition equipment: On the resistance evaporation coating equipment, a plate with uniform round holes is used as a shielding plate to realize the SERS enhancement effect of a 350nm thick silver film. The specific test and detection parameters are as follows:

[0049] Shading plate parameters: plate size: 20×40mm 2 , hole diameter: 2mm, hole spacing: 10mm, shielding plate placement method: placed in parallel at a distance of 5cm directly above the evaporation source, and a vertical distance of 20cm from the substrate table;

[0050] Deposition and film formation parameters: raw material: 99.99% pure silver, evaporation boat size: 100×10mm 2 , Substrate: k9 glass, substrate temperature: room temperature, evaporation vacuum: 5×10 -3 pa, evaporation current: 120A, evaporation rate: 1.5nm / s; film thickness: 350nm.

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Abstract

The invention discloses a device for realizing a thick silver film as a surface reinforced Raman scattering substrate by a physical method. A shielding plate is mounted on physical film plating equipment to replace a template, and is vertically placed rightly above an evaporation source; a hole is formed in the shielding plate; and a substrate is placed rightly above the shielding plate in parallel. The invention further discloses a corresponding method. The device has no need to prepare an AAO template and improve general PVD equipment, only simply modifies the general PVD equipment to directly use a pure silver raw material for preparing SERS substrate silver with higher performance, is more convenient for technology, is stronger in reinforcing effect, and can reach 10-13 M of R6G reinforcing capacity.

Description

technical field [0001] The invention relates to a device and method for physically realizing a thick silver thin film as a surface-enhanced Raman scattering (SERS) substrate. Background technique [0002] Surface-enhanced Raman (SERS) can obtain structural information that is not easily obtained by conventional Raman spectroscopy. It has high sensitivity and strong selectivity, and can enhance the Raman signal of molecules adsorbed on the surface of the substrate to 10 6 -10 14 times, it plays a huge role in the detection of chemistry, biology, medicine and so on. And the exertion of this huge effect is almost completely dependent on the substrate, so the research on SERS substrate has always been one of the research hotspots in the field of SERS. Silver is the easiest material to observe the SERS effect, and the enhancement factor is the largest. [0003] The SERS effect is related to the surface plasmon resonance (SPR) peak of the substrate material. The thinner silver ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C23C14/26C23C14/30C23C14/35C23C14/14G01N21/65
CPCC23C14/223C23C14/14C23C14/26C23C14/30C23C14/35G01N21/658
Inventor 吕晶沈秀球梁雄林丽梅刘美梅王颖赖国忠
Owner LONGYAN UNIV
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