Device and method for realizing thick silver film as surface reinforced Raman scattering substrate by physical method
A surface-enhanced Raman and physical method technology, applied in Raman scattering, measuring devices, sputtering coating, etc., can solve the problems of insufficient enhancement effect and harsh preparation conditions, and achieve strong enhancement effect and convenient preparation technology Effect
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[0048] Deposition equipment: On the resistance evaporation coating equipment, a plate with uniform round holes is used as a shielding plate to realize the SERS enhancement effect of a 350nm thick silver film. The specific test and detection parameters are as follows:
[0049] Shading plate parameters: plate size: 20×40mm 2 , hole diameter: 2mm, hole spacing: 10mm, shielding plate placement method: placed in parallel at a distance of 5cm directly above the evaporation source, and a vertical distance of 20cm from the substrate table;
[0050] Deposition and film formation parameters: raw material: 99.99% pure silver, evaporation boat size: 100×10mm 2 , Substrate: k9 glass, substrate temperature: room temperature, evaporation vacuum: 5×10 -3 pa, evaporation current: 120A, evaporation rate: 1.5nm / s; film thickness: 350nm.
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