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Method for measuring separation coefficient during process of silicon isotope separation (chemical exchange method) and apparatus thereof

A technology of chemical exchange and silicon isotope, applied in the direction of measuring devices, scientific instruments, analytical materials, etc., can solve the problems such as no longer applicable, and achieve the effect of convenient operation, real and reliable results, and good sealing

Inactive Publication Date: 2016-05-04
BOHAI UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0006] The present invention aims at the problem that the existing glass reactor used to measure the separation factor is no longer applicable in the silicon isotope system, and provides a method for measuring the separation factor of the process of separating silicon isotopes by chemical exchange and the device used therefor. Designed to provide basic data for industrial design

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  • Method for measuring separation coefficient during process of silicon isotope separation (chemical exchange method) and apparatus thereof

Examples

Experimental program
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Effect test

Embodiment 1

[0054] In this embodiment, methanol is used as a complexing agent, and SiF 4 The silicon isotope chemical exchange reaction is carried out between the gas and the silicon tetrafluoride methanol complex, and the silicon isotope separation coefficient at different temperatures and pressures is measured.

[0055] The specific process is as follows.

[0056] 1. Methanol needs to be dehydrated before the experiment to keep the water content below 50ppm. The purity of SiF4 gas used is higher than 99.99%, and the purity of nitrogen gas is higher than 99.9999%.

[0057] 2. Repeat vacuuming and nitrogen filling for the whole device 3 times, and finally vacuumize.

[0058] 3. Add 100ml of methanol into the chemical exchange reaction kettle; put distilled water into the refrigeration heater with stirring and temperature adjustment function, keep at 2°C, and set the rotation number of the stirring rotor at 50r / min.

[0059] 4. Inject SiF with a pressure of 0.1MPa into the chemical exch...

Embodiment 2

[0065] In this embodiment, ethanol is used as a complexing agent, and SiF 4 The silicon isotope chemical exchange reaction is carried out between the gas and the silicon tetrafluoride ethanol complex, and the silicon isotope separation coefficient at different temperatures and pressures is measured.

[0066] The specific process is as follows.

[0067] Before the experiment, the ethanol should be dehydrated to keep the water content below 50ppm. The amount of ethanol added is 100ml. Add distilled water and ice cubes to a freezer heating mixer and keep at 0°C.

[0068] The reaction conditions were maintained at a temperature of 0° C., a reaction pressure of 0.1 MPa, and a rotor speed of 50 r / min.

[0069] All the other operating steps are the same as in Example 1.

[0070] Through actual testing, the device of the present invention can accurately measure SiF 4 During the silicon isotope chemical exchange reaction between gas and silicon tetrafluoride ethanol complex, the s...

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Abstract

The invention discloses a method for measuring the separation coefficient during the process of silicon isotope separation (chemical exchange method) and an apparatus thereof. According to the method, an alcohol complexing agent is adopted, SiF4 gas and silicon tetrafluoride alcohol complex carry out silicon isotope chemical exchange reactions, and silicon isotope separation coefficients under different pressures at different temperatures are measured. The apparatus comprises a nitrogen gas steel cylinder (1), a reaction gas SiF4 steel cylinder (2), a SiF4 buffer tank (3), a molecular sieve column (4), a chemical exchange reactor (5), a freezing / heating device (6) with stirring and temperature adjusting functions, a liquid phase sampling bottle (7), a gas phase sampling bottle (8), a buffer tank (9), and a vacuum pump (10). The apparatus has a reasonable structure, and the method and apparatus can be used to measure the separation coefficients of isotope exchange of a silicon tetrafluoride- silicon tetrafluoride complex system under different pressures at different temperatures.

Description

technical field [0001] The invention belongs to the field of purification and production of isotopically pure silicon materials in the modern electronics and semiconductor industries, and particularly relates to a method for measuring the separation coefficient of the process of separating silicon isotopes by a chemical exchange method and a device used therefor, which is applicable to different pressures and temperatures Under certain conditions, the measurement of the chemical exchange separation coefficient involving silicon tetrafluoride-silicon tetrafluoride complex can provide basic data for the chemical exchange separation of silicon isotopes and the design of industrial-scale separation devices. Background technique [0002] In modern electronics and semiconductor industries, silicon materials have been widely used, and more than 90% of semiconductor components are made of silicon. Natural silicon contains three stable isotopes 28 Si, 29 Si, 30 Si, its content is ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01N27/62G01N27/626
CPCG01N27/62
Inventor 唐克钱建华刘琳邢锦娟许家胜
Owner BOHAI UNIV
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