Super graphene glass, and preparation method and applications thereof

A graphene and quartz glass technology, applied in the field of materials, can solve the problems of reducing the quality of the film, complicated processes, etc., and achieve the effect of avoiding damage

Active Publication Date: 2016-06-08
北京石墨烯研究院有限公司
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

However, this method is limited by factors such as complicated procedures, t

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  • Super graphene glass, and preparation method and applications thereof
  • Super graphene glass, and preparation method and applications thereof
  • Super graphene glass, and preparation method and applications thereof

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0050] Embodiment 1. Using quartz glass as a substrate, super graphene glass was prepared by atmospheric pressure thermal chemical vapor deposition (APCVD), demonstrating its biocompatible properties of supporting cell growth.

[0051] 1) The quartz glass disc substrate (radius 1.5cm, thickness 4mm) was ultrasonically cleaned (ultrasonic bath) in ultrapure water, isopropanol, acetone and ultrapure water for 5 minutes each, and the ultrasonic power of the ultrasonic bath was 80W. The quartz glass substrate after the ultrasonic bath was blown dry with high-purity nitrogen to obtain a quartz glass substrate, which was set aside.

[0052] 2) Put the quartz glass substrate obtained after cleaning into the APCVD cavity, and put Ar and H 2 The gas flow meters are set to 100sccm and 50sccm respectively, and the Ar and H 2 Valve, for scrubbing process, the purpose is to get rid of H in the reaction chamber 2 O and O 2 , and the duration is 10 minutes. After the gas scrubbing is com...

Embodiment 2

[0062] Example 2. Using ordinary white glass as a substrate, graphene glass was prepared by molten-state APCVD, and its conductive properties were demonstrated.

[0063] 1) According to the method in step 1 of Example 1, the quartz glass was replaced with common white glass (both length and width were 5 cm, and the thickness was 4 mm), to obtain a clean common white glass substrate.

[0064] 2) Put the ordinary white glass substrate obtained after cleaning into a cube graphite crucible, then put the crucible into an APCVD cavity, and put Ar and H 2 The gas flow meters are set to 150sccm and 20sccm respectively, and the Ar and H 2 Valve, for scrubbing process, the purpose is to get rid of H in the reaction chamber 2 O and O 2 , and the duration is 10 minutes. After the gas washing is completed, the air pressure of the APCVD chamber is 1 atmosphere, and the ordinary white glass substrate is heated up to 1000°C, and Ar and H are kept during the heating process. 2 The flow rat...

Embodiment 3

[0070] Example 3. Using ordinary white glass as a substrate, graphene glass was prepared by plasma-enhanced chemical vapor deposition (PECVD), and its surface hydrophobicity was demonstrated.

[0071] 1) According to the method in Step 1 of Example 1, replace the quartz glass with common white glass (3 cm in length, 1 cm in width, and 4 mm in thickness) to obtain a clean common white glass substrate.

[0072] 2) Put the ordinary white glass obtained after cleaning as the substrate into the PECVD chamber, evacuate to 1Pa, and pass CH 4 Gas (5.5sccm), ordinary white glass substrate is heated up to 600°C, and the pressure of the controlled gas does not exceed 40Pa. When the system is stable, turn on the plasma power supply of 80W and react for 1 hour. Methane ionizes and cracks into active groups. The active groups on the surface of the substrate at 600°C react, carbon and carbon form bonds, and graphene grows directly. After the reaction is completed Turn off the plasma power s...

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Abstract

The invention discloses a super graphene glass, and a preparation method and applications thereof. The preparation method comprises following steps: glass taken as a substrate is washed and dried, and is delivered into a chemical vapor deposition system for chemical vapor deposition; and after deposition, temperature is reduced to room temperature so as to obtain the super graphene glass. Selective use of different chemical vapor deposition methods can be realized based on the kinds of glass, and direct growth of high quality graphene with controllable layer number can be realized on the selected glass substrate so as to realize preparation of the super graphene glass. The preparation method is capable of realizing direct preparation of graphene films with controllable thickness on various glass substrates, and the prepared super graphene glass possesses super properties. Preparation of the super graphene glass is disclosed in the invention for the first time, so that the preparation method possesses significant importance on fundamental researches and large scale application of graphene glass.

Description

technical field [0001] The invention belongs to the field of materials, and relates to a super graphene glass and its preparation method and application. Background technique [0002] Graphene is a two-dimensional atomic crystal with a thickness of only one atom and a hexagonal honeycomb crystal structure. It is made of carbon sp 2 Hybrid orbitals form bonds. Graphene has good mechanical strength and ultra-high carrier mobility (theoretical predictions can be as high as 200,000 cm 2 ·V -1 ·s -1 ), excellent conductivity and high light transmittance related to the number of layers, making it have broad application prospects in fields such as field effect transistors, transparent conductive films, and supercapacitors. Especially in terms of optics, graphene maintains good light transmission in the range from visible light to far infrared, and the single-layer light absorption rate is only 2.3%. Combined with its excellent electrical conductivity and flexibility, graphene i...

Claims

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Application Information

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IPC IPC(8): C03C17/22
Inventor 刘忠范孙靖宇陈宇滨张艳锋
Owner 北京石墨烯研究院有限公司
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