A micro-nano magnetoelectric coupling device based on ferroelectric thin film and self-assembled magnetic nanoparticle structure

A technology of magnetic nanoparticles and ferroelectric thin films, which is applied to devices applying electro-magnetic effects, parts of electromagnetic equipment, and electric solid devices, etc. It can solve complex processes, difficult integration preparation, and influence on the performance of magnetoelectric materials, etc. problem, to achieve the effect of simple production process

Inactive Publication Date: 2018-10-23
CHONGQING UNIVERSITY OF SCIENCE AND TECHNOLOGY
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  • Abstract
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  • Claims
  • Application Information

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Problems solved by technology

At present, there are many types of magnetoelectric coupling devices made of magnetoelectric composite materials, but the performance of magnetoelectric coupling devices is greatly affected by the preparation, and the controllability during the preparation process is poor, and the design of integrated preparation is poor.
The layered magnetoelectric composite material produced by the commonly used compression bonding method has many phase interface defects, poor microscopic controllability and complicated process in the preparation process; and operation requirements are very high; the process of preparing and processing devices based on these materials will affect the performance of magnetoelectric materials, and it is difficult to carry out controllable integrated preparation

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  • A micro-nano magnetoelectric coupling device based on ferroelectric thin film and self-assembled magnetic nanoparticle structure
  • A micro-nano magnetoelectric coupling device based on ferroelectric thin film and self-assembled magnetic nanoparticle structure
  • A micro-nano magnetoelectric coupling device based on ferroelectric thin film and self-assembled magnetic nanoparticle structure

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Embodiment Construction

[0018] The ferroelectric film is made of lead zirconate titanate film, and the substrate is Pt / Ti / SiO 2 / Si(100) substrate, the magnetic metal chloride is nickel dichloride. Using lead acetate, tetrabutyl titanate and zirconium nitrate as the ion source of lead zirconate titanate, according to the chemical formula Pb(Zr 0.53 Ti 0.47 )O 3 And add 5% more lead acetate (to compensate for the volatilization loss of lead in the PZT wet film during the annealing process) to prepare a 2mol / L precursor solution sol. Dissolve lead acetate trihydrate and zirconium nitrate pentahydrate in ethylene glycol monomethyl ether solvent, and stir for 1 hour at 90°C. The stabilizer acetylacetone (the molar ratio to Zr is 1:2) was added to the above solution, and stirred at 80° C. for 30 minutes. Add tetrabutyl titanate to the prepared Pb and Zr mixture, stir at 80°C for 1 hour, then add 0.4% formamide to adjust the viscosity, and filter with filter paper after cooling to obtain the PZT precur...

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Abstract

Aiming at the problem that high-performance micro-nano magnetoelectric coupling devices are not easy to be controllably prepared, the present invention proposes a patterned +Z and -Z ferroelectric domain processing of ferroelectric thin films through piezoelectric force response microscopy technology, and then through The photochemical deposition method polarizes self-assembled magnetic metal nanoparticles on the surface of ferroelectric domains, and prepares a magnetoelectric coupling device with ferroelectric film and self-assembled magnetic nanoparticle structure. The device includes a ferroelectric thin film layer, a conductive substrate supporting the ferroelectric thin film, and a magnetic nanoparticle structure formed by self-assembly on the ferroelectric thin film layer. The invention utilizes the piezoelectric force response microscopy technology to process PZT ferroelectric domains at the micro-nano level according to the polarization distribution of any pattern, and self-assembles the magnetic metal nanoparticle structure through the photochemical deposition method. The production process is simple, and it is suitable for micro-nano magnetoelectric coupling devices. Integrated preparation.

Description

technical field [0001] The invention relates to a magnetoelectric coupling device, in particular to a magnetoelectric coupling device, which is patterned and polarized on a ferroelectric thin film by piezoelectric force response microscopy, and self-assembled magnetic nanoparticle structure is deposited on the polarized micro-region. electrically coupled devices. Background technique [0002] The magnetoelectric coupling effect is a phenomenon in which materials generate magnetic polarization (electrical polarization) under the action of an electric field (magnetic field). Magnetoelectric materials have a broad application prospect in the field of sensors because they have ferroelectricity, ferromagnetism, and ferroelasticity, and can produce magnetoelectric coupling effects. The magnetoelectric coupling effect has great potential application value in energy harvesting and conversion devices, magnetic detection and sensor devices, tunable microwave devices, information stor...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): H01L43/00H01L43/02H01L43/12
CPCH10N50/00H10N50/80H10N50/01
Inventor 刘晓燕邸永江李江宇谢淑红
Owner CHONGQING UNIVERSITY OF SCIENCE AND TECHNOLOGY
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