System for detection CdS film thickness online based on transmittance
A film thickness and transmittance technology, applied in semiconductor/solid-state device testing/measurement, electrical components, circuits, etc., can solve problems such as incompatibility and low measurement efficiency, and improve production efficiency, reduce production costs, and test speed. quick effect
Inactive Publication Date: 2016-08-24
SHENZHEN APG MATERIAL TECH
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Problems solved by technology
At present, the test methods of CdS thin thickness include acid corrosion step method, ellipsometer and other test methods. These test methods are only suitable for small area measurement and low measurement efficiency, and are not suitable for industrial production.
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Embodiment approach
[0016] The system for online detection of CdS film thickness based on transmittance includes the following parts: UV-Vis spectrophotometer, which includes a monochromatic light source generator and a light intensity detection system; several sensors; several serial interfaces and data lines; a controller; a computer tower.
[0017] Firstly, the establishment of the database corresponding to the transmittance and thickness of CdS thin film samples:
[0018] Step 1: Collect light transmission data of CdS films with different thicknesses on the production line;
[0019] application figure 1 The schematic system measures the transmittance of a series of CdS standard samples with different thicknesses. The specific implementation process is as follows:
[0020] On the assembly line after CdS film deposition, when the standard CdS sample reaches the sensor position, the controller sends a signal transmission to stop, and controls the UV-Vis spectrophotometer to measure the transmi...
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Abstract
The invention discloses a system for detection CdS film thickness online based on transmittance. The system comprises a monochromatic light source generator, a light intensity detection system, a plurality of sensors, a controller and a computer capable of converting transmittance data into film thickness data. The sensors are used for detecting the position of a CdS film and sending detection signals to the controller; after receiving the signals of the sensors, the controller controls the monochromatic light source generator and the light intensity detection system to work; the monochromatic light source generator and the light intensity detection system are used for detecting the transmittance of the CdS film online; and the light intensity detection system transmits detection data to the computer to obtain the film thickness data. Sensitive band is absorbed by the CdS film, and detection resolution can reach nanometer level; and besides, the system also has the features of being lossless and quick to detect and the like, and can be embedded in a production line.
Description
technical field [0001] The invention belongs to the technical field of CdTe thin-film solar cells, and relates to a method for online detection of CdS film thickness, in particular to a system for online detection of CdS film thickness based on transmittance. Background technique [0002] CdS is a II-VI compound semiconductor material and is a very important photosensitive semiconductor material, which is widely used in the field of optoelectronics. In particular, CdS polycrystalline thin films are used as window layers in heterojunction solar cells, and are applied to CdTe / CdS heterojunction solar cells and copper indium gallium selenide (CIGS) solar cells. [0003] In the solar cell process, in order to improve the conversion efficiency of the cell, it is required to control the thickness of the CdS film in the window layer at 10-120nm. At the same time, in order to ensure the product yield, this makes the control of the thickness of the CdS film particularly important in ...
Claims
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Login to View More IPC IPC(8): H01L21/66
CPCH01L22/12
Inventor 黄勇彪林文宝刘海燕涂代旺郑林芬
Owner SHENZHEN APG MATERIAL TECH