High-contrast-grating coupled-cavity narrow-spectral-line-width surface-emitting laser

Abstract

The invention, which belongs to the technical field of the photoelectron, discloses a high-contrast-grating coupled-cavity narrow-spectral-line-width surface-emitting laser. A high-contrast grating having high reflectivity and large reflecting width is used as a reflector and is integrated to the top of a transverse-mode-based vertical-cavity surface-emitting laser; and on the basis of the high reflectivity of the high-contrast grating, emergent light of a device is fed back and photoinjection is carried out on the device, thereby obtaining a novel coupled-cavity integrated surface-emitting laser. Therefore, extension of an effective resonant cavity of the device is realized; and the spectral line width of the transverse-mode-based vertical-cavity surface-emitting laser is reduced to obtain a narrow-spectral-line-width surface-emitting laser. Because of utilization of the high-contrast-grating structure with support of the low refractive index, the integrated outer cavity preparation difficulty is reduced and the device processing process is simplified; the preparation process is a pure planar process, so that the yield and reliability of the device are improved effectively. The laser has advantages of large spectral line width adjusting range, obvious narrowing effect, and simple design and preparation process.

Description

technical field [0001] The invention belongs to the technical field of optoelectronics, and in particular relates to the design and manufacture of a novel integrated external cavity vertical cavity surface emitting semiconductor laser. Suitable for vertical cavity surface emitting semiconductor lasers with various wavelengths (650nm, 850nm, 852nm 980nm, 1064nm, 1310nm and 1550nm, etc.). Background technique [0002] Vertical-cavity surface-emitting lasers (Vertical-cavity surface-emitting lasers, VCSELs) are used in short-distance data transmission due to their low cost, low power consumption, easy packaging, high beam quality, and excellent high-speed modulation characteristics under low current conditions. , optical interconnection, optical storage and other aspects have a very good application. However, due to the disadvantages of multi-transverse-mode lasing and unstable polarization directions, ordinary VCSELs limit their applications in the fields of sensing and chip-...

AI Technical Summary

Problems solved by technology

However, the spectral linewidth of the current fundamental transverse mode single-polarization VCSEL is 100MHz, which limits the application of VCSEL in microsystems such as atomic sensing. Research on the preparation of high-performance VCSEL devices to meet the application of new microsystems such as atomic clocks has become a research topic for people. The hot issue, the core of which is to prepare VCSEL devices with narrow spectral linewidth

Images