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Coating method of super-hard antifriction abrasion-resistance composite film layer on surface of titanium alloy and titanium alloy material

A composite film layer and titanium alloy technology, applied in metal material coating process, coating, sputtering plating, etc., can solve problems such as poor wear resistance, achieve improved wear resistance, excellent bearing capacity, and improved friction The effect of academic conditions

Inactive Publication Date: 2016-12-07
SHANGHAI RES INST OF MATERIALS CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0006] The purpose of the present invention is to overcome the shortcomings and deficiencies of the poor wear resistance of titanium alloy itself, and provide a superhard anti-friction and wear-resistant coating method on the surface of titanium alloy

Method used

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  • Coating method of super-hard antifriction abrasion-resistance composite film layer on surface of titanium alloy and titanium alloy material
  • Coating method of super-hard antifriction abrasion-resistance composite film layer on surface of titanium alloy and titanium alloy material

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0035] A TC4 titanium alloy ultrasonic cutting knife is selected as the substrate of the embodiment.

[0036] The specific preparation steps of superhard anti-friction and wear-resistant coating on the surface are as follows:

[0037] (1) ultrasonically clean the ultrasonic cutting cutter in ethanol to remove surface processing oil stains, etc.;

[0038] (2) Clean the previous degreasing process in deionized water to remove the cleaning residue of the ultrasonic cutting cutter;

[0039] (3) Drying the ultrasonic cutting cutter in a vacuum oven;

[0040] (4) Install the ultrasonic cutting knife on the workpiece frame, and vacuum the sputtering chamber to 2.0×10 -4 Pa;

[0041](5) Introduce argon gas into the vacuum chamber, the flow rate of argon gas is 20sccm, the pressure of the vacuum chamber is adjusted to 0.5Pa, the ion source is turned on at 2.5kV, the ion beam current is 30mA, the working time is 30min, and the ultrasonic cutting knife is cleaned with cations ;

[0...

Embodiment 2

[0054] A coating method for a superhard friction-reducing and wear-resistant composite film layer on the surface of a titanium alloy, using high-purity argon (99.99%), high-purity nitrogen (99.99%), high-purity titanium (99.99%) targets, and high-purity graphite ( 99.99%) target, the titanium film (Ti), titanium carbonitride film (TiCN) and diamond-like film (DLC) were sequentially deposited on the surface of the titanium alloy by magnetron sputtering to establish a Ti / TiCN / DLC surface enhanced A composite film layer, wherein the titanium film is used as a metal bonding layer, the titanium carbonitride film is used as a bearing layer, and the diamond-like film is used as a friction-reducing and wear-resisting layer on the surface.

[0055] The titanium alloy in this embodiment is specifically Ti-6Al-4V.

[0056] The coating method of the superhard friction-reducing and wear-resisting composite film layer on the surface of the titanium alloy in this embodiment specifically incl...

Embodiment 3

[0071] A coating method for a superhard friction-reducing and wear-resistant composite film layer on the surface of a titanium alloy, using high-purity argon (99.99%), high-purity nitrogen (99.99%), high-purity titanium (99.99%) targets, and high-purity graphite ( 99.99%) target, the titanium film (Ti), titanium carbonitride film (TiCN) and diamond-like film (DLC) were sequentially deposited on the surface of the titanium alloy by magnetron sputtering to establish a Ti / TiCN / DLC surface enhanced A composite film layer, wherein the titanium film is used as a metal bonding layer, the titanium carbonitride film is used as a bearing layer, and the diamond-like film is used as a friction-reducing and wear-resisting layer on the surface.

[0072] The titanium alloy in this embodiment is specifically Ti-5Al-2.5Sn.

[0073] The coating method of the superhard friction-reducing and wear-resisting composite film layer on the surface of the titanium alloy in this embodiment specifically i...

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Abstract

The invention relates to a coating method of a super-hard antifriction abrasion-resistance composite film layer on the surface of titanium alloy and a titanium alloy material. A magnetron sputtering method is adopted, a titanium film, a carbonitride titanium film and a diamond-like film are sequentially deposited on the surface of the titanium alloy, and a Ti / TiCN / DLC composite film layer is established, wherein the titanium film serves as a metal bonding layer, the carbonitride titanium film serves as a bearing layer, and the diamond-like film serves as a surface antifriction abrasion-resistant layer. Compared with the prior art, the coating method of the super-hard antifriction abrasion-resistance composite film layer on the surface of the titanium alloy and the titanium alloy material effectively overcome the defects that a single-layer diamond-like film is poor in bonding force, and the antifriction effect of a carbonitride titanium coating is not remarkable. The method is simple in technique and can be widely applied to antifriction, abrasion resistance and reinforcement of the surface of the titanium alloy.

Description

technical field [0001] The invention relates to the technical field of surface engineering, in particular to a coating method of a superhard friction-reducing and wear-resistant composite film layer on the surface of a titanium alloy and a titanium alloy material. Background technique [0002] Titanium and titanium alloys have the advantages of low density, light weight, high specific strength, corrosion resistance to seawater and marine atmosphere, etc., and also have the characteristics of non-magnetic, sound-transparent, shock-resistant and vibration-resistant, and good machinability. It has been widely used in petrochemical, biomedical and other civil industries. However, the shortcomings of titanium alloys are also quite obvious, such as low surface hardness and poor wear resistance. Under the condition of sliding friction, it is easy to adhere to the friction material and cause wear, and the friction and wear resistance are quite low, which seriously limits its applic...

Claims

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Application Information

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IPC IPC(8): C23C14/35C23C14/16C23C14/06C23C14/02
CPCC23C14/352C23C14/025C23C14/0605C23C14/0664C23C14/165
Inventor 王飞张全成周隐玉郑博史忠兵
Owner SHANGHAI RES INST OF MATERIALS CO LTD
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