III-family nitride biological probe and preparation method thereof
A biological probe and group nitrogen technology, applied in electrical components, circuits, semiconductor devices, etc., can solve problems such as short life, unstable luminescence, and low fluorescence efficiency, and achieve the effects of low cost, high stability, and simple and mature technology
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[0042] The present invention also proposes a method for preparing a III-nitride biological probe, comprising the following steps: step S1: growing a first n-type gallium nitride layer on a substrate; step S2: growing a first n-type gallium nitride layer on the first n-type gallium nitride layer growing a multi-quantum well layer on the multi-quantum well layer; step S3: growing a second n-type gallium nitride layer on the multi-quantum well layer; step S4: using a chemical etching method to etch the second n-type gallium nitride layer and the multi-quantum well layer, Get the quantum wire structure.
[0043] The chemical solution used for etching is a mixed solution of silver nitrate and hydrofluoric acid, and the chemical etching should be carried out under ultraviolet light.
[0044] The above preparation method also includes immersing the quantum wire structure in a chemical solution to remove the metal particles generated by chemical corrosion, and then ultrasonically clea...
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