Crystalline silicon heterojunction solar cell
A technology of solar cells and crystalline silicon, which is applied in the field of solar cells and semiconductor devices, can solve the problems that the photoelectric conversion efficiency of the cells has not been significantly improved, the series resistance of the cells is increased, and the light absorption coefficient is large, so as to avoid the loss of photogenerated current, Increase the open circuit voltage and reduce the effect of recombination
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Embodiment 1
[0016] (1) Preliminary cleaning of silicon wafers, double-sided texturing.
[0017] (2) Use hydrofluoric acid to remove the oxide layer on the surface of the silicon wafer, and use plasma enhanced chemical vapor deposition to prepare an amorphous silicon passivation layer and a p-type heavily doped amorphous silicon emitter.
[0018] (3) Prepare an ITO transparent conductive layer by sputtering on the amorphous silicon passivation layer and the p-type heavily doped amorphous silicon emitter, and then prepare the Ag metal grid line.
[0019] (4) The surface of the silicon wafer is reversed, and TiO is deposited on the other side using atomic layer epitaxy x layer.
[0020] (5) Metal Ag is deposited to prepare the back electrode.
Embodiment 2
[0022] (1) Preliminary cleaning of silicon wafers, double-sided texturing.
[0023] (2) Use hydrofluoric acid to remove the oxide layer on the surface of the silicon wafer, and use hot wire chemical vapor deposition to prepare the passivation layer of amorphous silicon and the p-type heavily doped amorphous silicon emitter.
[0024] (3) The AZO transparent conductive layer was prepared by sputtering the amorphous silicon passivation layer and the p-type heavily doped amorphous silicon emitter, and then the Cu metal grid line was prepared.
[0025] (4) The surface of the silicon wafer is reversed, and TiO is prepared on the other side by chemical vapor deposition x layer.
[0026] (5) on TiO x AZO was deposited on the layer by sputtering as a transparent conductive layer to prepare Cu metal grid lines.
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