Online monitoring device and method for wire bow of wire mesh of multi-wire sawing machine

Abstract

The invention discloses an online monitoring device and method for a wire bow of a wire mesh of a multi-wire sawing machine. The wire bow is an important factor influencing the quality of slices of the multi-wire sawing machine, but cutting areas are severe in environment and lack effective means for conducting online monitoring on the wire bow. The monitoring device and method involve a distance sensor, a shell, a protection gas inlet pipe, a support and a wire bow display module, the distance by which the mortar plane on the wire mesh deviates from the balance position during processing can be monitored online, and therefore the angle of the wire bow of the wire mesh is calculated. By means of the online monitoring device and method, online monitoring of the wire bow in the sawing process is achieved, and important application value for improving the slice quality and evaporating adjustment process parameters is achieved.

Description

technical field [0001] The invention relates to an online monitoring device and method for a wire, net, and wire bow of a multi-wire cutting machine, which is used for realizing online monitoring of a wire, net, and wire bow in a multi-wire cutting process, and belongs to the field of semiconductor hard and brittle material slicing processing. Background technique [0002] Crystalline materials, such as but not limited to monocrystalline silicon, polycrystalline silicon, sapphire, etc., are important substrate materials for integrated circuit chips, solar cells, and light-emitting diodes. They must be processed into thin sheets with high dimensional and shape accuracy. Because of the high hardness and brittleness of crystal materials, it is difficult to slice them. At present, most of the slicing processing of substrates is processed by multi-wire cutting machines. Multi-wire cutting machine is a new type of high-efficiency and high-precision cutting equipment, referred to ...

AI Technical Summary

Problems solved by technology

[0004] The present invention provides an online monitoring device and method for a multi-wire cutting machine wire network and wire bow, aiming at the problem that the wire bow is difficult to monitor in real time due to the harsh environment in the cutting area, which affects the slice quality and even the crystal ingot is scrapped due to wire breakage during the multi-wire cutting process.

Images