A carbon nanotube wall air friction sensor and its preparation method
A friction sensor and carbon nanotube technology, applied in the field of aerospace materials, can solve the problems of traditional sensors such as difficult processing and installation, low spatial resolution, and low dynamic response frequency, and achieve extremely low energy consumption, high temporal and spatial resolution, The effect of simple production process
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Embodiment 1
[0046] Embodiment 1 A carbon nanotube wall air friction sensor and its preparation method (as shown in 1(a) to 1(h))
[0047] (a) First, wash a 3mm thick, 3cm square organic glass substrate (1) with isopropanol. The surface was then cleaned with deionized water.
[0048] (b) Subsequently, the plexiglass substrate (1) was blown dry with pure nitrogen (N2). Use Labcoter (SpeciallyCoating SystemTM) to place a layer of 0.5 μm thick polychlorinated p-xylene (2) on the plexiglass substrate (1) to protect the plexiglass substrate (1) and strengthen the gold electrode (3) and the substrate (1 ) between the bonding.
[0049] (c) The ion sputtering coating method is adopted, the gold target is connected to the anode, and the plexiglass substrate (1) with one layer of polychlorinated p-xylylene (2) is connected to the cathode, after passing through three to five thousand volts of high voltage direct current, the gold An arc discharge is generated between the target and the plexiglass ...
Embodiment 2
[0055] A carbon nanotube wall air friction sensor described in Example 2 and its preparation method
[0056] On the basis of Example 1, another solution includes: (a) using clean plexiglass (PMMA) as the substrate. The square plexiglass base has a side length of 3 cm and a thickness of 3 mm.
[0057] (b) On top of the plexiglass substrate, a layer of 0.5 μm thick polychlorinated p-xylylene was spread to protect the plexiglass substrate and strengthen the adhesion between the gold electrode and the substrate.
[0058] (c) By sputtering and pattern etching, a 0.7 μm thick gold electrode and a wire connecting the gold electrode are arranged on the polychlorinated p-xylylene coating.
[0059] (d) By means of alternating current dielectrophoresis (DEP) technology, carbon nanotube bundles are manipulated and arranged to connect paired gold electrodes (the gap between the paired electrodes is 2 μm), and finally form the sensitive element of the sensor chip. Through thermal annealin...
Embodiment 3
[0060] Embodiment 3 performance test
[0061] A kind of carbon nanotube wall air friction sensor prepared by the method described in Example 1, the carbon nanotube sensor chip is connected to the printed circuit board by the aforementioned method and finally connected to the measurement circuit, such as figure 2 shown.
[0062] The technical indicators of the carbon nanotube wall friction test system are as shown in Table 1:
[0063] Table 1 Technical indicators of carbon nanotube wall friction test system
[0064]
[0065] Such as image 3 As shown, the carbon nanotube sensor system software in this embodiment is divided into three parts: pre-processing, acquisition, and post-processing. The pre-processing first measures the resistance of the sensor, and adjusts the variable resistance R in the bridge of the measurement circuit (common for constant temperature circuits and constant current circuits) according to the obtained resistance value and overheat ratio. 3 Trim...
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