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Method for coating tantalum spinneret surface with DLC film

A kind of technology of DLC film and spinneret

Inactive Publication Date: 2017-05-31
长沙南方钽铌有限责任公司
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Due to the high price of gold and platinum spinnerets, domestic enterprises use tantalum spinneret surface nitriding or tantalum spinneret pre-surface nitriding in anodic oxidation treatment, but the roughness of the spinneret channel after anodic oxidation treatment is reduced, making the spinneret The spinnability and use of the head are not as good as the gold platinum spinneret

Method used

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Examples

Experimental program
Comparison scheme
Effect test

Embodiment Construction

[0018] The tantalum spinneret is a Ф16 hat-type spinneret with a hole diameter of 0.055mm and a purity of 99.95%. The equipment is a magnetron sputtering coating machine, and the target material is gas acetylene.

[0019] The specific steps are: sulfuric acid at 140°C / 30 minutes→clean water rinse→ultrasonic cleaning with deionized water twice / 10 minutes each→ultrasonic cleaning with alcohol / 10 minutes→ultrasonic cleaning with acetone / 10 minutes→ultrasonic cleaning with deionized water / 10 minutes→baking Dry. After observing that there is no pollution or dirt under a measuring microscope with a magnification of 150 times, use an electric welding machine to weld a piece of tantalum foil on the spinneret and hang it on the pendant in the magnetron sputtering furnace, adjust the distance between the pendant and the distance Close the furnace door evenly, clean the surface of the spinneret with an ion source, turn on the vacuum pump after cleaning, and evacuate the furnace to a vacu...

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Abstract

The invention discloses a method for coating the tantalum spinneret surface with a DLC film. The method comprises the following steps that (1) the tantalum spinneret surface is polished till the roughness is 0.02 [mu]m or above; (2) a tantalum spinneret of which the surface is polished is cleaned and dried; and (3) the cleaned tantalum spinneret is detected through a microscope, if no contamination exists, the tantalum spinneret is put in a furnace, and the tantalum spinneret surface is coated with the DLC film through a magnetron sputtering method; acetylene serves as a target material for film coating, the film coating conditions are as follows: the vacuum degree is 5x10<-3> Pa to 8x10<-3> Pa, the temperature is 180-280 DEG C, and the sputtering time is 1-3 h; and the tantalum spinneret is cooled to the temperature of 100 DEG C or below after coating, so that the tantalum spinneret of which the surface is coated with the DLC film is obtained.

Description

technical field [0001] The invention relates to a method for coating a DLC film on the surface of a tantalum spinneret. Background technique [0002] The spinneret is an important spinning basic component for chemical fiber textile enterprises, and its quality directly affects the mechanical properties of the chemical fiber spinning machine. The materials for manufacturing spinnerets mainly include gold-platinum (Au-Pt), tantalum and other materials, and the spinnerets are required to have high hardness, high wear resistance, high surface roughness, and good spinnability. Due to the high price of gold and platinum spinnerets, domestic enterprises use tantalum spinneret surface nitriding or tantalum spinneret pre-surface nitriding in anodic oxidation treatment, but the roughness of the spinneret channel after anodic oxidation treatment is reduced, making the spinneret The spinnability and use of the head are not as good as the gold platinum spinneret. Contents of the inven...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C23C14/35C23C14/06
CPCC23C14/0605C23C14/35
Inventor 蒋坤林许登峰
Owner 长沙南方钽铌有限责任公司
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