Method for coating tantalum spinneret surface with DLC film
A kind of technology of DLC film and spinneret
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[0018] The tantalum spinneret is a Ф16 hat-type spinneret with a hole diameter of 0.055mm and a purity of 99.95%. The equipment is a magnetron sputtering coating machine, and the target material is gas acetylene.
[0019] The specific steps are: sulfuric acid at 140°C / 30 minutes→clean water rinse→ultrasonic cleaning with deionized water twice / 10 minutes each→ultrasonic cleaning with alcohol / 10 minutes→ultrasonic cleaning with acetone / 10 minutes→ultrasonic cleaning with deionized water / 10 minutes→baking Dry. After observing that there is no pollution or dirt under a measuring microscope with a magnification of 150 times, use an electric welding machine to weld a piece of tantalum foil on the spinneret and hang it on the pendant in the magnetron sputtering furnace, adjust the distance between the pendant and the distance Close the furnace door evenly, clean the surface of the spinneret with an ion source, turn on the vacuum pump after cleaning, and evacuate the furnace to a vacu...
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