Micronano-sized micro hole machining tool
A technology for processing machine tools and tiny holes, which is applied in metal processing machinery parts, metal processing equipment, manufacturing tools, etc. It can solve the problems of affecting dimensional and shape accuracy, increasing tool heating and wear, and chip clogging, etc., to improve processing efficiency, The effect of improving the quality of the finished product
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[0059] The present invention will be further described in detail below in conjunction with the accompanying drawings and specific embodiments, but the present invention is not limited to these embodiments.
[0060] Such as Figure 1 to Figure 21 As shown, a machine tool for micro-nano micro-hole processing includes a machine base 9 , a drilling device 4 , a multi-degree-of-freedom table system 5 , a micro-nano microscopic video system 2 and a control system 6 . For convenience of description, the length direction of the machine base 9 is defined as the X-axis direction, and the width direction of the machine base 9 is defined as the Y-axis direction.
[0061] Such as image 3 , Figure 6 As shown, in order to reduce the vibration during the processing of the workpiece, the processing machine tool also includes a vibration reduction and vibration isolation system. The vibration reduction and vibration isolation system includes four first giant magnetostrictive rods 111 arran...
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