Preparation method of liquid-proof coating adopting gradient increasing structure
A gradient-increasing, liquid-proof technology, applied in the field of ion chemical vapor deposition, can solve problems such as difficult to ensure coating adhesion, mechanical properties, hydrophobic properties, poor interfacial compatibility of multi-layer structure coatings, and loss of barrier properties. Strong strength, improved protection performance, and reduced stress cracking effects
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Embodiment 1
[0039] A method for preparing a liquid-proof coating with a gradient-increasing structure, characterized in that it mainly includes the following steps:
[0040] (1) Place the base material in the reaction chamber of the plasma chamber, the base material is a solid material, the solid material is an electronic component, and the reaction chamber is continuously evacuated, and the vacuum degree in the reaction chamber is evacuated to 10 mTorr, nitrogen gas is introduced to provide a stable plasma environment;
[0041] The volume of the plasma chamber is 50 liters, and the temperature of the plasma chamber is controlled at 30° C.; the flow rate of nitrogen gas is 5 sccm.
[0042] (2) Simultaneously feed the first monomer vapor, the second monomer vapor, and the third monomer vapor, start the plasma discharge, and carry out chemical vapor deposition;
[0043] The first monomer vapor is: monofunctional unsaturated fluorocarbon resin, the monofunctional unsaturated fluorocarbon re...
Embodiment 2
[0051] The basic process steps of this embodiment are the same as those of Example 1, and the different process parameters are as follows:
[0052] 1. In step (1), the substrate is a solid material, and the solid material is an electrical component. The vacuum in the reaction chamber is pumped to 200 millitorr, and an inert gas is introduced; the volume of the plasma chamber is 1000 liters, and the plasma chamber The temperature was controlled at 60° C.; the flow rate of the inert gas was 300 sccm, and the inert gas was argon.
[0053] 2. In step (2):
[0054] The first monomer vapor is: monofunctional unsaturated fluorocarbon resin, the monofunctional unsaturated fluorocarbon resin is 2-(perfluorodecyl) ethyl methacrylate, and the first monomer The steam is to atomize and volatilize the monomer through the feeding pump, and introduce it into the reaction chamber at a low pressure of 200 mTorr, and the flow rate of the first monomer steam is 1000 μL / min;
[0055] The second ...
Embodiment 3
[0061] The basic process steps of this embodiment are the same as those of Example 1, and the different process parameters are as follows:
[0062] 1. In step (1), the substrate is a solid material, and the solid material is a fabric. The vacuum in the reaction chamber is pumped to 50 millitorr, and an inert gas is introduced; the volume of the plasma chamber is 200 liters, and the volume of the plasma chamber is 200 liters. The temperature was controlled at 40° C.; the flow rate of the inert gas was 100 sccm, and the inert gas was helium.
[0063] 2. In step (2):
[0064] The first monomer vapor is: monofunctional unsaturated fluorocarbon resin, the monofunctional unsaturated fluorocarbon resin is 1-ethynyl-3,5-difluorobenzene, and the first monomer vapor is passed into The monomer is atomized and volatilized by the feeding pump, and introduced into the reaction chamber by a low pressure of 40 mTorr, and the flow rate of the first monomer vapor is 300 μL / min;
[0065] The s...
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