Method for calculating removal function of complex curved surface on basis of ion beam technology

Abstract

The invention discloses a method for calculating a removal function of a complex curved surface on the basis of an ion beam technology. The method comprises the steps that 1, ion concentration distribution d0 of ion beam flow at a distance of L from an ion source is measured; 2, a panel datum removal function of selected ion source working parameters at a distance of L is obtained through a removal function experiment, and a coefficient matrix C of the ion concentration corresponding to a material removal rate is obtained by calibrating the removal function; 3, ion concentration distribution da of the ion beam flow at a distance of L from the ion source is measured, a plane datum removal function F corresponding to the concentration distribution of the ion beam flow at a distance of L from the ion source is calculated and obtained; 4, spatial distribution of the ion beam flow concentration is measured and normalized to obtain a spatial distribution matrix of the ion beam flow Id; 5, influence of surface curvature radius variation of the complex curved surface on the removal function is calculated and a matrix Omega is obtained; 6, according to the plane datum removal function F, the spatial distribution matrix of the ion beam flow Id and the matrix Omega, the removal function R is obtained. According to the method for calculating the removal function of the complex curved surface on the basis of the ion beam technology, the removal function variation in the process of polishing the complex curved surface by the ion beam can be calculated accurately.

Description

technical field [0001] The invention belongs to the technical field of complex curved surface processing, and in particular relates to a complex curved surface removal function calculation method based on ion beam technology. Background technique [0002] At present, there are two main processing strategies for large-diameter complex curved surfaces. One is the use of contact material removal methods, including small grinding head technology based on the CCOS principle, stress disk technology, etc.; the other is non-contact optical processing methods, including plasma Reaction method, ion beam polishing method. The material removal principle of the contact processing method is to form microscopic material damage (pressure, shear force) within a certain depth of the mirror surface and realize material removal based on this. This method has high material removal efficiency and good material removal stability. However, there are many influencing factors in the processing proce...

AI Technical Summary

Problems solved by technology

However, there are many influencing factors in the processing process, such as temperature, abrasive concentration, pressure and relative movement speed of the grinding head, etc. may cause changes in material removal efficiency and reduce the certainty of optical processing.

Especially in the optical processing of large-diameter complex curved surfaces, it is difficult to fit closely between the grinding head and the mirror surface, resulting in significant changes in the removal function, and other surface errors will be introduced during optical processing, reducing processing efficiency and limiting final processing accuracy

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