Switched capacitor type ISFET signal reading circuit and control method thereof
A technology for reading circuits and switching capacitors, applied in electronic switches, logic circuits with logic functions, electrical components, etc., can solve the problem of low amplification accuracy of the on-chip signal reading circuit, and achieve reduced circuit power consumption and accurate acquisition , The effect of high signal accuracy
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[0040]In order to make the object, technical solution and advantages of the present invention clearer, the present invention will be further described in detail below in conjunction with specific embodiments and with reference to the accompanying drawings.
[0041] figure 1 It is the fabrication structure of ISFET devices under standard process. The sensitive layer is a passivation layer of a standard CMOS process, and the passivation layer is usually made of silicon dioxide and silicon nitride. The topmost material is often silicon nitride (for process reasons, it may be silicon oxynitride). General, Si 3 N 4 or SiN x o y It is an effective sensitive film. When the device is sensitive, the top of the device is placed in a solution, and the potential of the solution is stabilized at a specific value by a specific reference electrode. The hydrogen ions in the solution interact with the surface of the passivation layer to generate a charge effect. The charge effect is cou...
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