Active switch array substrate and manufacturing method thereof and display panel
A manufacturing method and switch array technology, applied in the field of display screens, can solve the problems of huge investment in equipment, complex processes, and high production costs, and achieve the effects of reducing production costs, improving efficiency and production capacity, and shortening production time
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[0055] In order to make the technical problems, technical solutions and beneficial effects to be solved by the present invention clearer, the following further describes the present invention in detail with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are only used to explain the present invention, but not to limit the present invention.
[0056] Such as figure 1 and figure 2 As shown, an embodiment of the present invention provides a manufacturing method of an active switch array substrate, including the following steps:
[0057] Step S100, a first metal layer is formed on a substrate 100, and the first metal layer is etched to form a gate electrode 1 of an active switch;
[0058] Step S200, deposit an insulating layer 2 on the substrate 100 and the gate 1;
[0059] Step S300, deposit an active layer 3 and an ohmic contact layer 4 on the insulating layer 2;
[0060] Step S400, deposit a second metal lay...
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