High-temperature thin film sensor with self-healing composite protective layer and preparation method thereof

Abstract

The invention belongs to the technical field of a sensor, and provides a high-temperature thin film sensor with a self-healing composite protective layer and a preparation method thereof, and aims to realize miniaturization and thin-film application of the sensor. The thin film sensor is composed of a substrate, a thin film sensor sensitive functional layer and the self-healing composite protective layer, which are arranged from bottom to top in order, wherein the structure of the self-healing composite protective layer comprises YSiO / HfSiBCN periodic multilayer membrane structures from bottom to top in order, and the lowest layer and the topmost layer of the protective layer are both YSiO low-oxygen diffusion coefficient layers. The high-temperature thin film sensor adopts the self-healing composite protective layer with the self-healing composite protective layer, the YSiO low-oxygen diffusion coefficient layers and HfSiBCN self-healing layers are alternately deposited to form an anti-oxidative protection system with layers of protection, and therefore the thin film sensor can work for a long time under the condition of high temperature of 600-1500DEG C and has the advantages of high temperature resistance, corrosion resistance, oxidation resistance, fast response, etc.

Description

technical field [0001] The invention belongs to the technical field of sensor protection, and in particular relates to a high-temperature film sensor with a self-healing composite protective layer and a preparation method thereof. Background technique [0002] Aeroengines are known as the heart of aviation vehicles. When modern aero-engines are working, hot-end structural components such as turbine blades and combustion chambers are in harsh environments such as high temperature and high pressure generated by fuel combustion. Accurately measure the temperature, strain, and The distribution of performance parameters such as heat flow is crucial to the design, verification and optimization of aero-engines. [0003] Compared with traditional sensors, thin-film sensors have the advantages of small size (thickness is on the order of μm), fast response speed, array distribution measurement, and less impact on the parts to be tested and the test environment. The technical field o...

AI Technical Summary

Problems solved by technology

YSiO low oxygen diffusion coefficient layer and HfSiBCN self-healing layer are alternately deposited to form a "layer-by-layer fortification" anti-oxidation protection system to overcome the problem that thin-film sensors are easily oxidized in high-temperature, high-pressure, oxygen-enriched environments, resulting in performance degradation or even failure. , so as to realize the application of sensor miniaturization and thin film; the thin film sensor with self-healing composite protective layer in the present invention can work for a long time under high temperature oxidation conditions of 600°C to 1500°C, and has high temperature resistance, corrosion resistance, oxidation resistance, Quick response and other advantages

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