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Production method of beta-phase silicon nitride, and beta-phase silicon nitride

A technology of phase silicon nitride and production methods, applied in chemical instruments and methods, nitrogen compounds, inorganic chemistry, etc., can solve the problems of intermittent production pollution, poor product quality uniformity, occupational health damage, etc., and shorten the production cycle. , Controllable performance, the effect of prolonging the residence time

Inactive Publication Date: 2017-10-24
XINJIANG JINGSHUO NEW MATERIALS CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, the conventional direct nitriding production process has a series of problems such as long production cycle, high labor intensity, low production efficiency, environmental pollution and occupational health violations in intermittent production, and poor product quality uniformity.

Method used

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  • Production method of beta-phase silicon nitride, and beta-phase silicon nitride
  • Production method of beta-phase silicon nitride, and beta-phase silicon nitride

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0025] This embodiment provides a method for producing β-phase silicon nitride, comprising the following steps:

[0026] Feed raw material silicon and nitrogen into at least two fluidized bed devices connected in series for reaction at a reaction temperature of 1281-1600° C. to obtain β-phase silicon nitride.

[0027] In this example, the raw material silicon and nitrogen gas are fed into at least two-stage series fluidized bed devices to react at 1281-1600°C, and the multi-stage series series fluidized bed devices prolong the residence time of raw material silicon and nitrogen gas in it. Time, thereby increasing the contact time of raw material silicon and nitrogen, controlling the reaction rate of silicon and nitrogen, which is conducive to prolonging the reaction time, improving reaction efficiency, shortening the production cycle, and further improving the yield and uniformity of the generated β-phase silicon nitride .

Embodiment 2

[0029] like figure 1 As shown, the present embodiment provides a production method of β-phase silicon nitride, comprising the following steps:

[0030] Pass silicon powder with a particle size of 1 μm, nitrogen, and auxiliary material silicon nitride with a particle size of 20 μm into the fluidized bed device 4 in series in two stages for reaction, wherein the mass ratio of the silicon powder to the auxiliary material is 1:10, the pressure in the fluidized bed device 4 is 50KPag, the reaction temperature is 1400°C, and the reaction time in each stage of the fluidized bed device 4 in series is 600 seconds to obtain β-phase silicon nitride. The auxiliary material can separate or disperse the silicon solid phase. The auxiliary material silicon nitride has the function of separating or dispersing the silicon solid phase, avoiding the formation of by-products, and further facilitating the improvement of the yield of β-phase silicon nitride.

[0031] In this embodiment, the raw ma...

Embodiment 3

[0061] like figure 2 As shown, the present embodiment provides a production method of β-phase silicon nitride, comprising the following steps:

[0062] Pass silicon powder with a particle size of 60 μm, nitrogen, and auxiliary material silicon nitride into a three-stage series fluidized bed device 4 for reaction, wherein the mass ratio of the silicon powder to the auxiliary material is 10:1, and the flow The pressure in the fluidized bed device 4 is 0 KPag, the reaction temperature is 1600° C., and the reaction time in each stage of the fluidized bed device 4 in series is 300 seconds to obtain β-phase silicon nitride. The auxiliary material can separate or disperse the silicon solid phase. The auxiliary material silicon nitride has the function of separating or dispersing the silicon solid phase, avoiding the formation of by-products, and further facilitating the improvement of the yield of β-phase silicon nitride.

[0063] like figure 2 As shown, the difference between t...

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Abstract

The invention discloses a production method of beta-phase silicon nitride, and the beta-phase silicon nitride. The method comprises the following steps: introducing raw materials silicon and nitrogen into at least two-stage tandem fluidized bed device, and performing reaction at the temperature of 1281 to 1600 DEG C to obtain the beta-phase silicon nitride. The raw materials silicon and nitrogen are introduced into the at least two-stage tandem fluidized bed device to perform reaction at 1281 to 1600 DEG C, so that the retention time of the raw materials silicon and nitrogen in the device is prolonged through the multi-stage tandem fluidized bed device, the contact time of the e raw materials silicon and nitrogen is prolonged, the reaction time is prolonged, the reaction efficiency is improved, and the yield of the generated beta-phase silicon nitride is further increased. The preparation method provided by the invention is simple, the performance is controllable, the production cycle is short, the production cost is greatly reduced, and the preparation method is suitable for large-scale industrialized production.

Description

technical field [0001] The invention belongs to the technical field of polysilicon production, and in particular relates to a production method of β-phase silicon nitride and β-phase silicon nitride. Background technique [0002] The outstanding advantages of silicon nitride include high mechanical strength, good thermal stability, and stable chemical properties, which make it widely used in metallurgy, machinery, energy, chemical industry, semiconductor, aerospace, automotive industry, nuclear power engineering and medical engineering In the field, silicon nitride fully meets the high temperature, high speed, strong corrosive medium and high wear working environment often encountered by modern technology, and has a long working life and stable technical performance, which can be compared with superalloys, and the application effect is satisfactory. With the continuous expansion of the application range of silicon nitride materials, the preparation of high-performance and lo...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C01B21/068
Inventor 张吉武黄彬潘小龙刘兴平宋娟娟
Owner XINJIANG JINGSHUO NEW MATERIALS CO LTD
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