Component gradually changed alloy absorption layer of pyroelectric detector and preparation method thereof

A technology of pyroelectric detectors and composition gradients, applied in the field of absorbing layers, can solve the problems of high reflectivity and high reflectivity of metal absorbing layers, achieve the effects of eliminating reflection phenomena, solving high reflectivity, and simple preparation methods

Inactive Publication Date: 2017-11-17
UNIV OF ELECTRONICS SCI & TECH OF CHINA
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0005] In view of the above, in order to solve the problem of high reflectivity of the existing metal absorbing layer in the infrared band, the purpose of the present invention is to provide a gradient alloy absorbing layer of pyroelectric detector components and a preparation method thereof to solve the problem of existing metal absorbing layers. There is a problem that the absorbing layer made of nickel-chromium or other alloys has high reflectivity in the infrared band

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  • Component gradually changed alloy absorption layer of pyroelectric detector and preparation method thereof
  • Component gradually changed alloy absorption layer of pyroelectric detector and preparation method thereof

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preparation example Construction

[0032] A method for preparing a pyroelectric detector component graded alloy absorbing layer, comprising the following steps:

[0033] Step 1, preparing a bottom metal film on the top surface of the sensitive element;

[0034] Step 2, preparing a middle metal film on the bottom metal film prepared in step 1, and the refractive index of the middle metal film is smaller than the refractive index of the bottom metal film;

[0035] Step 3, preparing a top metal film on the middle metal film prepared in step 2, and the refractive index of the top metal film is smaller than that of the middle metal film.

[0036] The specific steps of this step one are: using magnetron sputtering method or evaporation method to prepare the bottom metal film on the top surface of the sensitive element, the material of the bottom metal film is one of bismuth, aluminum, titanium, nickel, chromium , the sputtering current of the target material of the bottom metal thin film is 0.8A, and the thickness o...

Embodiment 1

[0042] Such as figure 2 As shown, a pyroelectric detector composition gradient alloy absorber layer, the absorber layer in LiTaO 3 The crystalline flakes are spread out as the top layer of the pyroelectric sensitive unit.

[0043] LiTaO 3 The pre-preparation process of crystal flakes is as follows: in LiTaO 3 Prepare the lower electrode on the wafer; through grinding and polishing for LiTaO 3 The wafer is thinned to form pyroelectric sensitive cells.

[0044] Wash LiTaO 3 Crystal flakes, photolithographically patterned on the upper surface. Using magnetron sputtering technology to prepare chromium film as the bottom metal film, adjust the process pressure to 4Pa, and the sputtering current to 0.8A to obtain a dense chromium metal layer with a refractive index of 3.51, a porosity range of 15%, and a thickness range of Controlled at 10nm, there is better adhesion between the metal chromium and the substrate, which can improve the adhesion of the absorbing layer.

[0045]...

Embodiment 2

[0054] A pyroelectric detector component graded alloy absorber layer, the structure is made of LiTaO 3 A crystalline flake is spread out as the top layer of the pyroelectric sensitive unit 7 .

[0055] LiTaO 3 The pre-preparation process of the crystal sheet is: preparing the lower electrode on the lithium tantalate wafer; thinning the lithium tantalate wafer by grinding and polishing to form a pyroelectric sensitive unit.

[0056] Wash LiTaO 3 Crystal flakes, photolithographically patterned on the upper surface. Magnetron sputtering technology was used to prepare titanium thin film as the bottom metal thin film. The process pressure was adjusted to 4Pa and the sputtering current was 0.8A to obtain a dense titanium metal layer with a porosity of 15% and a thickness of 10nm.

[0057] On the surface of the bottom metal film, double-target sputtering technology is used to prepare the first middle-layer graded aluminum-titanium film. The process pressure is adjusted to 4Pa, the...

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Abstract

The invention discloses a component gradually changed alloy absorption layer of a pyroelectric detector and a preparation method thereof, belonging to the technical field of pyroelectric detectors. The aim of the invention is to provide the component gradually changed alloy absorption layer of the pyroelectric detector and the preparation method thereof, so as to solve the problem of high reflectivity in the infrared band of the absorption layer prepared by means of the nickel chromium or other alloy materials in the prior art. The component gradually changed alloy absorption layer of the pyroelectric detector comprises a bottom metal film, a middle layer metal film and a top layer metal film arranged on the top of the sensitive element successively from the bottom to the top, and the refractive indexes of which are gradually decreased. The preparation method of the component gradually changed alloy absorption layer of the pyroelectric detector comprises the following steps: preparing the bottom metal film on the top of sensitive element; preparing the middle layer metal film on the bottom metal film, and the refractive index of the middle layer metal film is smaller than the refractive index of the bottom metal film; and preparing the top layer metal film on the middle layer metal film, and the refractive index of the top metal film is smaller than that of the middle layer metal film. The invention is applied to the pyroelectric detector.

Description

technical field [0001] The invention belongs to the technical field of pyroelectric detectors, and relates to an absorbing layer in a pyroelectric detector. Background technique [0002] Pyroelectric detector is a kind of infrared radiation detection device, which is prepared by utilizing the characteristic of spontaneous polarization of pyroelectric body changing with temperature. Compared with other detectors, it not only maintains the advantages of thermal detectors working in the room temperature band, but also can withstand large radiation power, have a higher detection rate in a wide temperature and frequency range, and have a smaller time constant Features. Pyroelectric detectors are widely used in the fields of national defense, industry, medicine and scientific research, such as intrusion alarm, security monitoring, fire alarm, industrial production monitoring, aircraft and vehicle auxiliary driving, medical diagnosis and many other aspects. [0003] The detectabi...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H01L37/02
CPCH10N15/15
Inventor 于贺太惠玲黎威志杜晓松蒋亚东
Owner UNIV OF ELECTRONICS SCI & TECH OF CHINA
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