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Electrode material of zinc antimonide thermoelectric material and preparation method of electrode material

A technology of electrode materials and thermoelectric materials, which is applied in the manufacture/processing of thermoelectric devices, materials for junction leads of thermoelectric devices, etc., and can solve the problems of zinc antimonide and other problems

Inactive Publication Date: 2017-12-05
SHENZHEN UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, there is no research on the ohmic contact of zinc antimonide electrodes at home and abroad.

Method used

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Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0007] In the experiment, the magnetron sputtering method was used to deposit metal cobalt electrodes on the p-type zinc antimonide thin film with metal cobalt as the target material. Concrete preparation process is as follows:

[0008] Step 1: Zinc antimonide is washed with acetone, alcohol, and deionized water, dried and introduced into the growth chamber;

[0009] Step 2: Cobalt metal is used as the target material, and a 100 μm thick stainless steel plate with electrode patterns is used as a mask, and cobalt metal electrodes are deposited on the zinc antimonide film cleaned in step 1 by magnetron sputtering, and the working gas is argon Gas, the working pressure is 0.4Pa, the radio frequency power is 50W, the pre-sputtering time is 3min and the deposition time is 10min, and the thickness of the prepared metal cobalt electrode is 100nm after testing;

[0010] Step 3, the sample is annealed under the protection of argon, the air pressure is 420Pa, the annealing temperature ...

Embodiment 2

[0012] The experiment adopts the magnetron sputtering method, using metal cobalt as the target material, depositing metal cobalt electrodes on the p-type zinc antimonide thin film, adding surface roughening process before electrode preparation. Concrete preparation process is as follows:

[0013] Step 1, zinc antimonide is washed with acetone, alcohol and deionized water;

[0014] Step 2, soaking the zinc antimonide sample cleaned in step 1 in 0.1% dilute hydrochloric acid solution for 5 seconds, washing and drying with deionized water, and then introducing it into the growth chamber;

[0015] Step 3: Cobalt metal is used as a target material, and a 100 μm thick stainless steel plate with an electrode pattern is used as a mask, and a metal cobalt electrode is deposited on the zinc antimonide film cleaned in step 2 by magnetron sputtering, and the working gas is argon Gas, the working pressure is 0.4Pa, the radio frequency power is 50W, the pre-sputtering time is 3min and the ...

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Abstract

The invention relates to an electrode material of a zinc antimonide thermoelectric material and a preparation technology of the electrode material. The electrode material is characterized by being metal cobalt, gold, platinum, palladium or an alloy thereof. Before an electrode is prepared, roughening treatment is carried out on the surface of a zinc antimonide film to promote formation of ohmic contact. After the electrode is put into the zinc antimonide thermoelectric material, thermal treatment is carried out to further reduce the contact resistivity. Low contact resistivity is very important to preparation of a miniature zinc antimonide device and is one of key factors of determining the efficiency of the miniature device.

Description

Technical field: [0001] The invention relates to a component electrode based on a thermoelectric material and a preparation process thereof. Specifically, the electrode is prepared based on zinc antimonide and zinc antimonide doped thermoelectric thin film devices, and belongs to the fields of thermoelectric power generation, semiconductor refrigeration and sensors. Background technique: [0002] Thermoelectric materials are materials that can directly convert thermoelectricity to electricity. According to statistics, more than 60% of energy is emitted in the form of waste heat in the process of energy use, and thermoelectric materials can directly convert these wasted heat energy into electrical energy, and can be used in waste heat recovery from automobile engines and exhaust gas, waste heat recovery from factories, and solar thermal power generation. And aerospace has a wide range of applications. In addition, thermoelectric materials can also be fabricated into semicond...

Claims

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Application Information

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IPC IPC(8): H01L35/18H01L35/34
CPCH10N10/853H10N10/01
Inventor 钟爱华范平尹楣楣张东平罗景庭李甫郑壮豪谢毅柱蔡兴民
Owner SHENZHEN UNIV