Silicon-based micro-gas chromatography column with high separation efficiency, and preparation method thereof

A technology of micro-gas chromatography and separation efficiency, which is applied in the field of silicon-based micro-gas chromatography column and its preparation, can solve the problems that the separation efficiency of silicon-based micro-gas chromatography column is difficult to further improve, achieve good thermal stability and mechanical strength, and improve The effect of separation efficiency
CN107561201AActive Publication Date: 2018-01-09SHANGHAI INST OF MICROSYSTEM & INFORMATION TECH CHINESE ACAD OF SCI
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Patent Information

Authority / Receiving Office
CN · China
Current Assignee / Owner
SHANGHAI INST OF MICROSYSTEM & INFORMATION TECH CHINESE ACAD OF SCI
Publication Date
2018-01-09

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Abstract

The present invention provides a silicon-based micro-gas chromatography column with high separation efficiency, and a preparation method thereof. The preparation method comprises: 1) producing a micro-ditch channel and a micro-fluidic port on a silicon substrate; 2) producing a mask layer to protect the bonding surface on the silicon substrate; 3) constructing nanometer mesoporous silica in the micro-ditch channel; 4) bonding a packaging cover plate onto the bonding surface of the silicon substrate; and 5) forming a corresponding modification material on the surface of the nanometer mesoporoussilica based on the component to be separated. According to the present invention, due to large specific surface area, large pore volume, good thermal stability and good mechanical strength of the nanometer mesoporous silica, the nanometer mesoporous silica is constructed in the silicon-based micro-gas chromatography column so as to substantially improve the separation efficiency of the chromatography column; and the surface of the nanometer mesoporous silica has the high-density silanol (Si-OH), such that the single molecule layers having different separation functions can be further constructed on the surface according different separated objected so as to achieve the desired separation effect.
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Description

technical field

[0001] The invention relates to a silicon-based micro-gas chromatographic column with high separation efficiency and a preparation method thereof, which belongs to the field of micro-electromechanical systems, in particular to a silicon-based micro-gas chromatographic column with high separation efficiency based on mesoporous silicon oxide nanostructure technology. Micro gas chromatography column and preparation method thereof. Background technique

[0002] The main function of the gas chromatographic column is to separate the mixed sample gas to be analyzed, which is the core component of the gas chromatograph. Traditional gas chromatography columns include capillary columns, packed columns, etc. Due to their large volume, special column thermostats are needed to heat them, and their power consumption can reach several kilowatts. Therefore, in order to realize the miniaturization of gas chromatographs, the micro Transformation is crucial.

[0003] Since th...

Claims

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