Diamond micro drilling tool and machining method thereof
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Applications(China)
- Current Assignee / Owner
- GUANGDONG UNIV OF TECH
- Publication Date
- 2018-02-09
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Abstract
Description
technical field
[0001] The invention relates to a diamond micro-drilling tool and a processing method thereof. Background technique
[0002] With the development of industrial technology, the demand for microstructure processing of hard and brittle materials, as well as micro components and micro products in the fields of electronics, machinery, and biotechnology is increasing. At present, the methods suitable for micro-processing of hard and brittle materials mainly include micro-ultrasonic machining and micro-laser machining. Because micro-ultrasonic machining has no thermal effect, it can process tiny three-dimensional structures with high aspect ratios, and the surface quality and machining accuracy of parts are high, which determines that micro-ultrasonic machining has unique advantages in the processing of microstructures of hard and brittle materials.
[0003] Micro-drilling plays a very important role in micro-ultrasonic machining. General micro-drilling is to use a...