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A kind of preparation method of molybdenum disulfide target material

A technology of molybdenum disulfide and target materials, which is applied in the direction of molybdenum sulfide, etc., can solve the problems affecting the quality of molybdenum disulfide sputtering targets, low density of forming blanks, disordered crystal structure, etc., and achieve the reduction of quality purity requirements and quality purity And the effect of high density and regular shape

Active Publication Date: 2019-06-04
JINDUICHENG MOLYBDENUM CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

The molybdenum disulfide sputtering target is usually made of molybdenum disulfide powder by pressing and sintering. Most of the commercially available molybdenum disulfide powders are obtained from molybdenite by natural methods, and the quality and purity are low; while molybdenum disulfide obtained by synthetic methods The crystal structure of the powder is disordered and the lubricity is poor, which seriously affects the quality of the molybdenum disulfide sputtering target
In addition, molybdenum disulfide is a lamellar compound with a hexagonal crystal structure. There is weak van der Waals force between layers, and the layers are easy to peel off. It has good anisotropy and low friction coefficient, so molybdenum disulfide It is difficult to press and form, and the density of the forming blank is low. At present, the mass purity of the molybdenum disulfide target is 99%, and the density is lower than 4.0g / cm 3

Method used

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Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0020] This embodiment includes the following steps:

[0021] Step 1. Put the molybdenum disulfide powder in a vacuum of 4.8×10 -3 Pa, heat treatment under the condition of 300°C for 120min; the mass purity of the molybdenum disulfide powder is 99.2%, and the average particle size is 50μm;

[0022] Step 2. Under the protection of an argon atmosphere, the heat-treated molybdenum disulfide powder in step 1 is hot-pressed and sintered for 240 minutes at a temperature of 800° C. and a pressure of 30 MPa to obtain a molybdenum disulfide blank;

[0023] Step 3: Machining and cleaning the molybdenum disulfide blank obtained in step 2 to finally obtain a molybdenum disulfide target.

[0024] After testing, the mass purity of the molybdenum disulfide target prepared in this example is 99.5%, and the density is 4.1g / cm 3 .

Embodiment 2

[0026] This embodiment includes the following steps:

[0027] Step 1. Put the molybdenum disulfide powder in a vacuum of 1.1×10 -2 Pa, heat treatment for 15 minutes at a temperature of 900°C; the mass purity of the molybdenum disulfide powder is 99.2%, and the average particle size is 22.5 μm;

[0028] Step 2. Under the protection of an argon atmosphere, the heat-treated molybdenum disulfide powder in step 1 is hot-pressed and sintered for 180 minutes at a temperature of 1300° C. and a pressure of 150 MPa to obtain a molybdenum disulfide blank;

[0029] Step 3: Machining and cleaning the molybdenum disulfide blank obtained in step 2 to finally obtain a molybdenum disulfide target.

[0030] After testing, the mass purity of the molybdenum disulfide target prepared in this example is 99.9%, and the density is 4.2g / cm 3 .

Embodiment 3

[0032] This embodiment includes the following steps:

[0033] Step 1. Put the molybdenum disulfide powder in a vacuum of 6.0×10 -3 Pa, heat treatment for 90 minutes at a temperature of 500° C.; the mass purity of the molybdenum disulfide powder is 99.2%, and the average particle size is 0.5 μm;

[0034] Step 2. Under the protection of a nitrogen atmosphere, the heat-treated molybdenum disulfide powder in step 1 is hot-pressed and sintered for 15 minutes at a temperature of 1000° C. and a pressure of 500 MPa to obtain a molybdenum disulfide blank;

[0035] Step 3: Machining and cleaning the molybdenum disulfide blank obtained in step 2 to finally obtain a molybdenum disulfide target.

[0036] After testing, the mass purity of the molybdenum disulfide target prepared in this example is 99.8%, and the density is 4.4g / cm 3 .

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Abstract

The invention discloses a preparation method of a molybdenum disulfide target material. The preparation method comprises the following steps of 1, performing vacuum low-temperature heat treatment on molybdenum disulfide powder; 2, performing hot-pressing sintering on the molybdenum disulfide after the vacuum low-temperature heat treatment under the protective atmosphere, so as to obtain a molybdenum disulfide blank; 3, mechanically processing and cleaning the molybdenum disulfide blank, so as to obtain the molybdenum disulfide target material. The preparation method has the advantages that themolybdenum disulfide target material is directly prepared by the protective atmosphere hot-pressing sintering method, the one-time forming effect is realized, the ball milling on the molybdenum disulfide powder or pressing of crude blank is not required, the technology process is shortened, the decomposing of the molybdenum disulfide is avoided, and the production efficiency and the density of the target material are improved. The molybdenum disulfide target material prepared by the preparation method has the advantages that the quality, purity and density are respectively higher, the size and shape are controllable, and the molybdenum disulfide target material is suitable for scaled production.

Description

technical field [0001] The invention belongs to the technical field of target material preparation, and in particular relates to a method for preparing a molybdenum disulfide target material. Background technique [0002] Molybdenum disulfide is an important solid lubricant, known as "the king of high-grade solid lubricants", which can be added to various greases to form a colloidal state that will never stick, increasing the lubricity and extreme pressure properties of grease, It is suitable for mechanical working conditions of high temperature, high pressure, high speed and high load. Molybdenum disulfide film has the advantages of high bearing capacity and low friction coefficient, which can greatly reduce the friction and wear of the workpiece surface, improve the use efficiency of the workpiece, and prolong the service life of the workpiece. It is one of the most widely used lubricating film materials for space precision machinery , often used in friction and wear work...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): C01G39/06C04B35/547C04B35/645
CPCC01G39/06C01P2004/64C01P2006/10C01P2006/80C04B35/547C04B35/645C04B2235/658C04B2235/77C04B2235/95
Inventor 崔玉青席莎安耿李晶朱琦王娜武洲
Owner JINDUICHENG MOLYBDENUM CO LTD