Preparation method of catalyst film for decomposition of hydrogen phosphide gas
A catalyst film and phosphine technology, applied in the direction of physical/chemical process catalysts, separation methods, chemical instruments and methods, etc., can solve the problems of increasing the pressure drop of gas delivery, not using industrial scale applications, and low gas flux , to achieve the effects of increasing contact opportunities, reducing catalyst costs, and increasing gas flux
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Embodiment 1
[0015] A method for preparing a catalyst membrane for decomposing phosphine gas, comprising the following steps: 1) After mixing 150 mL of tetrabutyl titanate with 20 mL of ethanol, adding 5 g of N-isopropylacrylamide to form a mixed solution, and Spread the mixed solution on the surface of quartz glass, and then drop 50 ml of 5% polyethylene glycol ethanol aqueous solution (volume ratio 1 / 1) with a pH of 4 to each part of the above mixed solution, and let it stand for 7 Day, release the mold to form a titanium dioxide gel film. 2) The titanium dioxide gel film obtained in 1) was immersed in a mixed solution of 0.8%, 0.4% nickel nitrate, and ferric nitrate for 6 h and pulled at a uniform speed, then dried at 80 °C for 6 h, and then calcined at 500 °C for 6 h , and finally reduced under hydrogen at 200°C for 3 h to obtain Ni-Fe 3 o 4 / TiO 2 Porous membrane catalyst. Wherein Ni content is 0.5%, Fe 3 o 4 The content is 0.2%.
[0016] The obtained catalyst is used for the c...
Embodiment 2
[0018] A method for preparing a catalyst membrane for decomposing phosphine gas, comprising the following steps: 1) After mixing 250 mL of tetrabutyl titanate with 20 mL of ethanol, adding 8 g of N-isopropylacrylamide to form a mixed solution, and Spread the mixed solution on the surface of quartz glass, and then drop 50 ml of 5% polyethylene glycol ethanol aqueous solution (volume ratio 1 / 1) with a pH of 4 to each part of the above mixed solution, and let it stand for 7 Day, release the mold to form a titanium dioxide gel film. 2) The titanium dioxide gel film obtained in 1) was immersed in a mixed solution of 0.9%, 0.3% nickel nitrate and ferric nitrate for 6 h and pulled at a uniform speed, then dried at 80 °C for 6 h, and then calcined at 500 °C for 6 h , and finally reduced under hydrogen at 200°C for 3 h to obtain Ni-Fe 3 o 4 / TiO 2 Porous membrane catalyst. Wherein Ni content is 0.3%, Fe 3 o 4 The content is 0.05%.
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