Vacuum tube type microwave heating carbon furnace

Abstract

The invention provides a vacuum tube type microwave heating carbon furnace, relates to the technical field of high temperature vacuum coating equipment, and solves the technical problems that a heating temperature field inside the furnace is non-uniform and the resistance value of a resistor carbon film is not inconsistent. The vacuum tube type microwave heating carbon furnace comprises a furnacebody, a magnetron, a double-layer vacuum quartz tube with a jacket, and a microwave absorbing heating material, wherein the magnetron is arranged on a furnace body, and the magnetron can emit microwaves inside an inner cavity of the furnace body after being electrified; the vacuum quartz tube is arranged inside the furnace body in a rotating manner, and treated workpieces are placed inside the vacuum quartz tube for carbon coating film treatment; and the microwave absorbing heating material inside the jacket of the vacuum quartz tube can emit heat after absorbing microwaves, and the furnace body is further internally provided with a heat insulation layer made of a microwave-transmitting material. A novel material sintering method has the characteristics of high heating rate, high energy utilization rate, high heating efficiency, uniform material temperature field, good technological controllability, short technological period, good product uniformity and high rate of finished products.

Description

technical field [0001] The invention relates to the technical field of high-temperature vacuum coating equipment, in particular to a vacuum tube type microwave heating quilt carbon furnace. Background technique [0002] Carbon film resistors are a type of film resistors (Film Resistors). It uses high-temperature vacuum coating technology to attach carbon tightly to the surface of the porcelain rod to form a carbon film (carbon film resistors use organic binders to make carbon ink, graphite and fillers into suspensions and coat them on the insulating substrate, after heating Polymerized. Gaseous hydrocarbons are decomposed at high temperature and vacuum, and carbon is deposited on the porcelain rod or tube to form a layer of crystalline carbon film). Then cut the appropriate joints and coat the surface with epoxy resin for sealing protection. The thickness of the carbon film determines the size of the resistance value, and the thickness of the control film and the groove ar...

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Problems solved by technology

[0005] The purpose of the present invention is to provide a vacuum tube type microwave heating quilt carbon furnace to solve the technical problems of uneven heating temperature field in the furnace and inconsistent resistance values ​​of resistors existing in the prior art

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