The utility model relates to
vacuum evaporation technology field discloses a vertical
evaporation source of evaporating, including frame, the top of frame is equipped with feeding mechanism, and the side or both sides of feeding mechanism detachably installs
evaporation source body,
evaporation source body includes
water cooling shell, and the upper and lower distribution of
water cooling shell far away from the one end of feeding mechanism is equipped with a plurality of material bins, and the top of material bin detachably installs bin cover, and the lower end of material bin is connected with the material conveying
pipe through the
ball valve, and the lower end of material conveying
pipe is connected with the
crucible in
water cooling shell, and the opening of lower end of material conveying
pipe is equipped with the door subassembly, and the front and back two side walls of
crucible evenly distribute and are equipped with the heating wire one that links to each other, and the side of
crucible in water cooling shell is close to feeding mechanism is equipped with the heating cavity that communicates with the crucible, and the one end far away from crucible of heating cavity is embedded and is equipped with a plurality of sprayers, through side -mounting evaporation source body, optimizing steam flow guide structure, setting sealing door subassembly and
temperature control heat preservation device, both solve the problem of large wide
substrate deformation, improve the
coating quality, improve material utilization, reduce the cost.