Production method of low-surface-reflectivity diamond wire-cut polycrystalline silicon wafer texture

Abstract

The invention discloses a production method of low-surface-reflectivity diamond wire-cut polycrystalline silicon wafer texture, comprising the steps of (1) at 20-50 DEG C, soaking a diamond wire-cut polycrystalline silicon wafer that is washed in a first corrosive liquid for corroding for 20-60 min, wherein the first corrosive liquid is a mixed solution of HF, Fe(NO3) and ethanol, HF has a concentration of 1-10 mol / L, Fe(NO3)3 has a concentration of 0.1-1 mol / L, and ethanol has a concentration of volume percent of 1-5%; (2) at 10-30 DEG C, soaking the diamond wire-cut polycrystalline silicon wafer corroded in step (1) in a second corrosive liquid for corroding for 10-30 min, wherein the second corrosive liquid is a mixed solution of ammonia water, hydrogen peroxide and deionized water, thevolume ratio of the liquid ammonia, hydrogen peroxide and deionized water is 1:(1-3):(1-6), the liquid ammonia has a concentration of volume percent of 25%, and the hydrogen peroxide has a concentration of mass percent of 30%; (3) washing, with deionized water, the diamond wire-cut polycrystalline silicon wafer that is corroded, and blow-drying. The low-surface-reflectivity diamond wire-cut polycrystalline silicon wafer texture produced by the production method has low reflectivity and long life.

Description

technical field [0001] The invention relates to the field of solar energy applications, in particular to a method for preparing the suede surface of diamond wire-cut polysilicon solar cells with low surface reflectivity. Background technique [0002] Currently, the most important solar cell material is crystalline silicon, which accounts for more than 90% of the market share. Crystalline silicon is mainly divided into monocrystalline silicon and polycrystalline silicon. Due to the lower cost of polycrystalline silicon, its market share has always surpassed that of monocrystalline silicon to dominate the photovoltaic market. [0003] For polycrystalline silicon solar cells, how to improve cell efficiency while reducing cost is a current research hotspot. Fabricating textured surfaces on silicon wafers can effectively reduce light reflectance and increase light absorption, thereby improving the efficiency of solar cells. [0004] Diamond wire-cut polysilicon wafers have the ...

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Problems solved by technology

[0005] However, the texturing of diamond wire polysilicon wafers is a big problem

Due to the shallow damage layer cut by diamond wire polysilicon wafers, the difference between the line mark area and the non-line mark area is large, and the reflection and line marks on the surface of the silicon wafer after conventional acid texturing are serious, the cashmere rate is low, and the reflectivity is high, so After being made into a battery sheet, the efficiency is low, and the appearance cannot pass

While other methods such as plasma dry etching (RIE), laser grooving and other dry etching methods can prepare relatively uniform and low reflectivity suede, but these methods are very expensive and expensive equipment, silicon wafers There will also be relatively serious mechanical damage on the surface; the use of metal-assisted catalytic corrosion to prepare suede has a high cost, and at the same time, the treatment of waste liquid containing precious metals is also a problem that needs attention, and industrial production is relatively difficult

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