Quantum dot structure photoelectric detector and preparation method thereof
A technology of photodetectors and quantum dots, applied in the field of photodetectors, can solve problems such as large dark current and slow response speed, and achieve the effects of increasing life, improving device performance, and expanding the control range
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[0020] In order to make the purpose, technical solution and advantages of the present application clearer, the present application will be further described in detail below in conjunction with the accompanying drawings and specific embodiments. For simplicity, some technical features known to those skilled in the art are omitted from the following description.
[0021] Such as image 3 As shown, the present embodiment provides a method for preparing a photodetector with a quantum dot structure, which is characterized in that it has a highly doped silicon substrate 1 covered with an aluminum oxide dielectric layer 2, comprising the following steps:
[0022] Using detergent, acetone, ethanol and deionized water to ultrasonically clean the highly doped silicon substrate 1 in sequence;
[0023] Transferring the graphene onto the alumina dielectric layer 2 to form a graphene layer 3;
[0024] Spin-coat photoresist on the graphene layer 3, photoresist off the photoresist at the po...
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