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Miniature flexible biological electrode array and preparation method thereof

A bio-electrode and flexible technology, applied in the field of micro-flexible bio-electrode arrays and its preparation, can solve the problems of short service life, large size, poor biological and mechanical properties of bio-electrodes, and achieve improved sensitivity, signal-to-noise ratio, anti- Effect of high tensile strength, improved biocompatibility and long-term stability

Active Publication Date: 2018-07-20
THE NAT CENT FOR NANOSCI & TECH NCNST OF CHINA
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0007] Therefore, based on the defects of the above-mentioned prior art, in order to solve the problems of poor biological and mechanical properties, large size and short service life of existing bioelectrodes, the present invention The purpose is to provide a micro flexible bioelectrode array and its preparation method

Method used

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  • Miniature flexible biological electrode array and preparation method thereof
  • Miniature flexible biological electrode array and preparation method thereof
  • Miniature flexible biological electrode array and preparation method thereof

Examples

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Effect test

Embodiment 1

[0040] This example is used to illustrate the preparation of the miniature flexible bioelectrode array provided by the present invention.

[0041] Dry by hot pressing to form a 10 μm thick cellulose film ( figure 1 A) Prepare a shadow mask of a 30-micron electrode array with a single electrode. After covering the shadow mask, vacuumize in a vacuum evaporation apparatus for 4 hours, and then coat a layer of 10 nm on the surface of bacterial cellulose at 0.1À / s. Cr, and then vapor-deposit 100nm Au on its surface at 0.1À / s for about 18 minutes. During the metal evaporation process, the thickness of the electrode deposited on the substrate can be controlled by adjusting the evaporation time. After the metal layer electrode is prepared, a layer of SiNx insulating layer is deposited on the metal surface by low-temperature PECVD and shadow mask on the surface of the metal conductive electrode. Due to the uneven heat dissipation and heat generation during the PECVD evaporation proces...

Embodiment 2

[0044] This example is used to illustrate the preparation of the miniature flexible bioelectrode array provided by the present invention.

[0045] Heat and dry to form a cellulose film with a thickness of 10 microns, and prepare a shadowmask of a 30-micron electrode array with a single electrode. After covering the shadow mask, vacuumize in a vacuum evaporation apparatus for 4 hours, and then coat the bacterial cellulose with 0.1À / s The surface is coated with a layer of 10nm Cr, and then evaporated at 0.1À / s for about 35 minutes to coat the surface with 200nm Au. During the metal evaporation process, the thickness of the electrode deposited on the substrate can be controlled by adjusting the evaporation time. After the metal layer electrode is prepared, use low-temperature PECVD and shadow mask to deposit a layer of SiNx insulating layer on the surface of the metal conductive electrode. Due to the uneven heat dissipation and heat generation during the PECVD evaporation process...

Embodiment 3

[0048] This example is used to illustrate the preparation of the miniature flexible bioelectrode array provided by the present invention.

[0049] Using the method of Example 2, based on the 200nm thick Au prepared by a 10 micron film, the electrode array diagram of the implantable miniature flexible bioelectrode array prepared in the body by replacing different metal masks, including reference electrodes at both ends, and the middle 37 a working electrode array. image 3 A shows the electrode array diagram of the implantable miniature flexible bioelectrode array prepared in this example.

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Abstract

The invention provides a miniature flexible biological electrode array. A miniature flexible biological electrode comprises a bacterial cellulose membrane, a metal conducting layer and an insulating layer in sequence. The miniature flexible biological electrode has the advantages of excellent flexibility, biocompatibility, low impedance, high throughput and the like. The invention further providesa preparation method of the miniature flexible biological electrode.

Description

technical field [0001] The invention belongs to the field of bioelectrochemical analysis. Specifically, the present invention provides a micro flexible bioelectrode array and a preparation method thereof. Background technique [0002] With the increasing shortage of global fossil energy, people pay more and more attention to renewable resources. Bacterial cellulose synthesized by microorganisms, as a natural polymer, has excellent mechanical properties, low density, perfect network structure and excellent Biocompatibility, as a new type of material used in various fields has become a research hotspot today. [0003] Due to its flexible characteristics, flexible bioelectrodes can be attached to the surface of irregular objects or rigid objects, and can also be attached to human skin. They have potential as wearable human health monitoring equipment detection and implantable bioelectrodes. application. [0004] Traditional bioelectrode technology needs to provide very low...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): A61B5/0402A61B5/0478B81B3/00B81C1/00A61K50/00
CPCA61B5/6867B81B3/00B81C1/00166A61B2562/125A61B5/318A61B5/291
Inventor 蒋兴宇杨俊川王乐
Owner THE NAT CENT FOR NANOSCI & TECH NCNST OF CHINA
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