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Method for reducing TMA (trimethylaluminum) consumption of PECVD (plasma-enhanced chemical vapor deposition) machine

A machine and energy consumption technology, applied in the field of silicon solar cell manufacturing, to achieve the effect of reducing TMA consumption, reducing process pressure, and realizing TMA consumption

Active Publication Date: 2018-08-31
平煤隆基新能源科技有限公司
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

At present, major battery manufacturers around the world are accelerating the introduction of PERC technology. At the same time, PERC batteries themselves are also facing the challenges of reducing production costs, improving battery performance, technological innovation and large-scale production.

Method used

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  • Method for reducing TMA (trimethylaluminum) consumption of PECVD (plasma-enhanced chemical vapor deposition) machine
  • Method for reducing TMA (trimethylaluminum) consumption of PECVD (plasma-enhanced chemical vapor deposition) machine

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Embodiment

[0025] Embodiment: Adopt technology of the present invention

[0026] Use a P-type monocrystalline silicon wafer with a resistivity of 1.1-1.8Ω cm and a size of 156.75mm×156.75mm. After conventional texturing, diffusion, etching, and annealing, aluminum oxide film and aluminum oxide film are sequentially coated on a German Mayer PECVD machine. Silicon nitride film, where the process of the silicon nitride cavity remains unchanged.

[0027] The process belt speed of the Maya PECVD alumina chamber is set at 185-200cm / min, the chamber temperature is set at 300-350°C, and the process pressure is set at 0.11-0.14mbar.

[0028] The Maya PECVD alumina chamber has two gas paths. Set the nitrous oxide flow rate of the first gas path to 600-700 sccm, the TMA flow rate to 0 mg / min, and the argon gas flow rate to 0 sccm. The laughing gas flow rate was set at 700-1000 sccm, the TMA flow rate was set at 200-300 mg / min, and the argon gas flow rate was set at 600-800 sccm.

[0029] At the s...

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Abstract

The invention discloses a method for reducing TMA (trimethylaluminum) consumption of a PECVD (plasma-enhanced chemical vapor deposition) machine. The process belt speed in an aluminum oxide cavity ofthe PECVD machine is set to be 185-200 cm / min, the temperature of the cavity is set to be 300-350 DEG C, the process pressure is set to be 0.11-0.14 mbar, the laughing gas flow of a first gas path isset to be 600-700 sccm, the TMA flow is set to be 0 mg / min, and the argon flow is set to be 0 sccm; the laughing gas flow of a second gas path is set to be 700-1,000 sccm, the TMA flow is set to be 200-300 mg / min, and the argon flow is set to be 600-800 sccm; the radio-frequency power of the first gas path is set to be 2,500 W, and the left and right duty ratios are set to be 6 / 17 and 6 / 18 respectively; the radio-frequency power of the second gas path is set to be 2,200 W, and the left and right duty ratios are set to be 4 / 17 and 4 / 18 respectively. Through comprehensive optimization adjustmentof the TMA gas flow, process pressure and radio-frequency power in the aluminum oxide cavity, the TMA consumption of the PECVD machine can be reduced, and the purpose of reducing the production costof PERC batteries is achieved.

Description

technical field [0001] The invention belongs to the technical field of silicon solar cell manufacturing, and in particular relates to a method for reducing TMA consumption of a PECVD machine. Background technique [0002] PERC technology, that is, passivated emitter back contact, forms a passivation layer on the back of silicon solar cells, which can greatly reduce the electrical recombination rate of the back surface, form a good internal optical back reflection mechanism, and increase the open circuit voltage and short circuit current of the battery, thereby Improve the conversion efficiency of the battery. PERC solar cell has the advantages of simple process, low cost, and high compatibility with existing cell production lines. It is a newly developed high-efficiency solar cell. It has received extensive attention from the industry and is expected to become the mainstream direction of high-efficiency solar cells in the future. . [0003] The core of the PERC solar cell ...

Claims

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Application Information

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IPC IPC(8): H01L31/18
CPCH01L31/18Y02P70/50
Inventor 彭平夏中高马岳辉李旭杰李鹏云陈庆发梁红菲陈伟兵
Owner 平煤隆基新能源科技有限公司
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