Nano-film rectangular thermocouple array thermoelectric micro-nano generator in radio frequency transceiver

Abstract

The invention provides a nano-film rectangular thermocouple array thermoelectric micro-nano generator in a radio frequency transceiver. A substrate is an N-type silicon wafer, and P-type arms of a thermopile, N-type arms of the thermopile, a first silicon nitride spacer, an electrode Ti / Au layer of the thermopile, a second silicon nitride spacer and a heat sink metal Al layer are prepared. The main unit of the thermoelectric micro-nano generator is a thermopile. The thermopile is composed of several P-type arms and N-type arms. The thermoelectric arms use a periodic nano-silicon multilayer film, a layer of metal Ti / Au is sputtered to connect P-type and N-type thermoelectric arms in series, and a thermopile structure is obtained by serial connection. The nano-silicon film used in the generator has much lower thermal conductivity than the conventional body material, thereby greatly improving the thermoelectric power generation efficiency. The waste heat generated by the generator when using the RF transceiver component is subjected to thermoelectric energy conversion and then is stored in the battery via a DC-DC boost voltage-stabilizing circuit, thereby powering the low-power modules such as the surrounding wireless sensor nodes.

Description

technical field [0001] The invention provides a nanometer film rectangular thermocouple array thermoelectric micro-nano generator in a radio frequency transceiver, which belongs to the technical field of micro-electro-mechanical systems (MEMS). Background technique [0002] Radio frequency transceiver components are an important part of radar technology and radio frequency communication. Since the radio frequency transceiver components will generate a lot of heat loss during normal operation, the heat dissipation power accounts for about 60% of the total energy consumption, which is a waste of energy. . At the same time, a large amount of heat dissipation will also cause a decrease in the reliability of the device itself. In order to improve the above problems, a nano-film rectangular thermocouple array thermoelectric micro-nano generator is used. The thermal conductivity of the nano-silicon film used is much lower than that of traditional Bulk materials can maintain electr...

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Problems solved by technology

[0002] Radio frequency transceiver components are an important part of radar technology and radio frequency communication. Since the radio frequency transceiver components will generate a lot of heat loss when they work normally, their heat dissipation power accounts for about 60% of the total energy consumption, which is a waste of energy.

At the same time, a large amount of heat dissipation will also cause a decrease in the reliability of the device itself. In order to improve the above problems, a nano-film rectangular thermocouple array thermoelectric micro-nano generator is used. The thermal conductivity of the nano-silicon film used is much lower than that of traditional Bulk material, which can maintain electron transport while inhibiting heat transport, thus greatly improving the efficiency of thermoelectric power generation, is of great significance in the practical application of thermoelectric power generation

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