Sapphire polishing solution with high surface evenness, and polishing technology thereof
A flatness and sapphire technology, applied in the field of sapphire polishing, can solve the problems of inability to achieve sapphire polishing removal rate and high surface flatness, affect the large-scale industrial application of sapphire crystal slices, and low processing efficiency, so as to achieve easy control of the polishing process, High removal rate, rapid production, and high production yield
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Embodiment 1
[0011] A sapphire polishing liquid with high surface smoothness, including rough polishing liquid and fine polishing liquid.
[0012] Coarse polishing liquid configuration: uniformly mix the following components, weight ratio 50% aluminum dioxide nanoparticles, 6% sodium methoxide, 0.16% sodium methylene dinaphthalene sulfonate, 0.7% sodium iminodisuccinate , and the balance of deionized water.
[0013] Fine polishing liquid configuration: uniformly mix the following components, 40% hydrophilic silica nanoparticles by weight, 0.3% non-ionic surfactant fatty alcohol polyoxyethylene ether (AEO), 0.8% sodium polyacrylate , 1.2% hydroxyethyl ethylenediamine and the balance of deionized water.
[0014] A sapphire polishing process with high surface smoothness: firstly, the sapphire is polished with a coarse polishing liquid, the polishing pressure is 0.15Mpa, the polishing disc rotation speed is 70r / min, the polishing liquid flow rate is 240mL / min, the polishing temperature is 25°...
Embodiment 2
[0016] A sapphire polishing liquid with high surface smoothness, including rough polishing liquid and fine polishing liquid.
[0017] Coarse polishing liquid configuration: uniformly mix the following components, weight ratio 40% aluminum dioxide nanoparticles, 8% sodium methoxide, 0.25% sodium methylene dinaphthalene sulfonate, 1.5% sodium iminodisuccinate , and the balance of deionized water.
[0018] Fine polishing liquid configuration: uniformly mix the following components, 50% hydrophilic silica nanoparticles by weight, 0.5% non-ionic surfactant fatty alcohol polyoxyethylene ether (AEO), 0.9% sodium polyacrylate , 1.5% hydroxyethyl ethylenediamine and the balance of deionized water.
[0019] A sapphire polishing process with high surface smoothness: firstly polish the sapphire with a coarse polishing liquid, the polishing pressure is 0.17Mpa, the polishing disc rotation speed is 90r / min, the polishing liquid flow rate is 270mL / min, the polishing temperature is 25°C, and...
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