Micro energy harvester based on polycrystalline silicon nanowire rectangular array and superlattice photoelectric structure

An energy harvester and rectangular array technology, applied in nanotechnology, photovoltaic power generation, nanotechnology, etc., can solve the problems of difficult battery replacement and system maintenance, high cost, etc., and achieve improved energy utilization efficiency, low cost, and high thermoelectricity The effect of conversion efficiency

Inactive Publication Date: 2018-09-07
SOUTHEAST UNIV
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  • Claims
  • Application Information

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Problems solved by technology

[0002] With the rapid development of micro-electromechanical systems, wireless communications, wearable devices and low-power embedded technologies, the power supply of these network nodes used to rely on batteries, but battery replacement and system maintenance are difficult and costly

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  • Micro energy harvester based on polycrystalline silicon nanowire rectangular array and superlattice photoelectric structure
  • Micro energy harvester based on polycrystalline silicon nanowire rectangular array and superlattice photoelectric structure
  • Micro energy harvester based on polycrystalline silicon nanowire rectangular array and superlattice photoelectric structure

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Embodiment Construction

[0030] The specific embodiments of the present invention will be further described below in conjunction with the accompanying drawings.

[0031] see figure 1 , the present invention proposes a miniature energy harvester based on a rectangular array of polysilicon nanowires and a superlattice optoelectronic structure, its main function is to collect the thermal energy of the radio frequency transceiver component amplifier 1 and the light energy in the environment to supply power to the wireless sensor node 5 . The metal cooling plate 12 of the miniature energy harvester 3 based on the polysilicon nanowire rectangular array and the superlattice photoelectric structure is pasted on the surface of the radio frequency transceiver component amplifier 1, and the output terminal of the radio frequency transceiver component amplifier 1 is connected to the follow-up signal processing module 2, based on The micro-energy harvester 3 of the polycrystalline silicon nanowire rectangular arr...

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Abstract

A micro energy harvester based on a polycrystalline silicon nanowire rectangular array and a superlattice photoelectric structure of the present invention is composed of a photovoltaic cell and a thermoelectric energy harvester. The photocell cell is a superlattice structure. The thermoelectric energy harvester is formed by a nanowire rectangular cell rectangular array. The nanowire rectangular unit uses a nano thermocouple obtaining by deep ultraviolet lithography, has a small volume compared with a conventional thermoelectric photoelectric energy harvester. Further, the nanowire rectangularunit has high thermoelectric photoelectric conversion efficiency. Electrical interconnection is achieved between nano thermocouple pairs and between the nanowire rectangular units by gold wires. The energy collected by photovoltaic cell and the thermoelectric energy harvester is output through a thermoelectric output pad and a photoelectric output pad. The collected energy is ultimately stored ina rechargeable battery, and the electrical energy in the rechargeable battery can provide power for wireless sensing nodes.

Description

technical field [0001] The invention proposes a miniature energy harvester based on a rectangular array of polysilicon nanowires and a superlattice photoelectric structure, which belongs to the technical field of microelectromechanical systems (MEMS). Background technique [0002] With the rapid development of micro-electromechanical systems, wireless communications, wearable devices, and low-power embedded technologies, the power supply of these network nodes used to rely on batteries, but battery replacement and system maintenance are difficult and costly. Energy harvesting technology that can achieve sustainable power supply brings a solution to local power supply. Thermoelectric energy harvesters have attracted the attention of industry and academia due to their small size, light weight, long life, no mechanical moving parts, and environmental protection. The rapid development and application of MEMS technology has put forward higher requirements for the temperature man...

Claims

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Application Information

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Patent Type & AuthorityApplications(China)
IPC IPC(8): H01L35/32H01L31/0475H02S10/30B81B7/02B82Y30/00H10N10/17
CPCH01L31/0475H02S10/30B81B7/02B82Y30/00H10N19/101Y02E10/50
Inventor廖小平严德洋
OwnerSOUTHEAST UNIV