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Manufacturing device and method of diamond film

A diamond film and preparation device technology, which is applied in metal material coating process, gaseous chemical plating, coating, etc., can solve the problems of low preparation efficiency and poor preparation quality, and achieve increased deposition speed, improved deposition quality, and improved The effect of preparation efficiency

Pending Publication Date: 2018-10-16
TAIYUAN NORMAL UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0003] In order to solve the problems of low preparation efficiency and poor preparation quality of the existing diamond film preparation method, the present invention provides a diamond film preparation device and method

Method used

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  • Manufacturing device and method of diamond film
  • Manufacturing device and method of diamond film

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Experimental program
Comparison scheme
Effect test

Embodiment 1

[0020] A device for preparing a diamond film, including a main body and a control part;

[0021] The main part includes a vacuum reaction chamber 101, a hot wire array 102, a support column 103, a cup-shaped water cooling chamber 104, a water inlet pipe 105, a water outlet pipe 106, a metal cooling plate 107, a substrate 108, a transmission column 109, a transmission plate 110, Waterproof cooling cover 111, ultrasonic transducer 112, speed sensor 113, displacement sensor 114, acceleration sensor 115;

[0022]The center of the top wall of the vacuum reaction chamber 101 is provided with an air inlet 116; the center of the bottom wall of the vacuum reaction chamber 101 is provided with an air outlet 117; the hot wire array 102 is installed horizontally on the upper part of the inner cavity of the vacuum reaction chamber 101; the support column 103 The number is several; each supporting column 103 is vertically fixed on the inner bottom wall of the vacuum reaction chamber 101; th...

Embodiment 2

[0035] A diamond film preparation device, including a main part and a control part;

[0036] The main part includes a vacuum reaction chamber 101, a hot wire array 102, a support column 103, a cup-shaped water cooling chamber 104, a water inlet pipe 105, a water outlet pipe 106, a metal cooling plate 107, a substrate 108, a transmission column 109, a transmission plate 110, Waterproof cooling cover 111, ultrasonic transducer 112, speed sensor 113, displacement sensor 114, acceleration sensor 115;

[0037]The center of the top wall of the vacuum reaction chamber 101 is provided with an air inlet 116; the center of the bottom wall of the vacuum reaction chamber 101 is provided with an air outlet 117; the hot wire array 102 is installed horizontally on the upper part of the inner cavity of the vacuum reaction chamber 101; the support column 103 The number is several; each supporting column 103 is vertically fixed on the inner bottom wall of the vacuum reaction chamber 101; the cu...

Embodiment 3

[0050] A diamond film preparation device, including a main part and a control part;

[0051] The main part includes a vacuum reaction chamber 101, a hot wire array 102, a support column 103, a cup-shaped water cooling chamber 104, a water inlet pipe 105, a water outlet pipe 106, a metal cooling plate 107, a substrate 108, a transmission column 109, a transmission plate 110, Waterproof cooling cover 111, ultrasonic transducer 112, speed sensor 113, displacement sensor 114, acceleration sensor 115;

[0052]The center of the top wall of the vacuum reaction chamber 101 is provided with an air inlet 116; the center of the bottom wall of the vacuum reaction chamber 101 is provided with an air outlet 117; the hot wire array 102 is installed horizontally on the upper part of the inner cavity of the vacuum reaction chamber 101; the support column 103 The number is several; each supporting column 103 is vertically fixed on the inner bottom wall of the vacuum reaction chamber 101; the cu...

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Abstract

The invention relates to the manufacturing technology of a diamond film, in particular to a manufacturing device and method of the diamond film. The problems that an existing manufacturing method of the diamond film is low in manufacturing efficiency and poor in manufacturing quality are solved. The manufacturing device of the diamond film comprises a main body part and a control part; the main body part comprises a vacuum reaction chamber, a heat wire array, supporting columns, a cup-shaped water cooling cavity, a water inlet pipe, a water outlet pipe, a metal heat dissipation plate, a substrate, transmission columns, a transmission plate, a waterproof heat dissipation cover, an ultrasonic transducer, a speed sensor, a displacement sensor and an acceleration sensor; and the control part comprises a differentiator, an integrator, a three-position conversion switch, an amplifier, a phase shifter, a main Schmidt trigger, a phase-locked loop, a first PWM control chip, a first MOSFET, a first switch power supply transformer, a first rectifier, a first attenuator and a first auxiliary Schmidt trigger. The method is suitable for manufacturing of the diamond film.

Description

technical field [0001] The invention relates to a diamond film preparation technology, in particular to a diamond film preparation device and method. Background technique [0002] Diamond film is a functional material with various excellent properties, which is widely used in microelectronics, optoelectronics, biomedicine, machinery, aerospace, nuclear energy and other fields. Under the existing technical conditions, the preparation methods of diamond film mainly include hot wire chemical vapor deposition method, microwave chemical vapor deposition method, direct current plasma jet chemical vapor deposition method and so on. Practice has shown that when the diamond film is prepared by the above method, due to the low relative velocity between the plasma and the substrate, and the deposition process is easy to precipitate non-diamond carbon, the deposition rate of the diamond film is low and the deposition quality is poor, resulting in diamond The preparation efficiency of t...

Claims

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Application Information

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IPC IPC(8): C23C16/27C23C16/513
CPCC23C16/276
Inventor 郝晋青路晓宇卫北海袁亨马会芳赵丽云姚芳王荣成
Owner TAIYUAN NORMAL UNIV
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