A piezoelectric hydrogen sensor and its preparation method and application
A sensor, hydrogen technology, applied in instruments, scientific instruments, material analysis by electromagnetic means, etc., can solve the problems of limited use range and high cost of hydrogen sensors
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Embodiment 1
[0038] as attached figure 1 As shown, a piezoelectric hydrogen sensor 1 includes a package housing 11 and a hydrogen sensor piezoelectric chip 2, wherein the hydrogen sensor piezoelectric chip 2 is composed of a metal palladium film 21, a conductive substrate 22 and a ZnO nanorod 23, and the hydrogen gas The sensor piezoelectric chip 2 is arranged inside the package housing 11, and the top and bottom of the package housing 11 are equipped with two gold electrodes 13, 14, and the two gold electrodes are respectively connected to the conductive substrate 22 and the conductive substrate 22 of the hydrogen sensor piezoelectric chip 2. The metal palladium thin film 21 is conductive, and there are air holes 12 on both sides of the packaging shell.
[0039] Wherein, the packaging shell is made of high-strength ceramic material.
[0040] As an optimized embodiment, the conductive substrate 22 of the present invention may be a highly doped n-type or p-type silicon wafer, or a metal wa...
Embodiment 2
[0042] This embodiment provides a method for preparing a piezoelectric hydrogen sensor, including:
[0043] The first step: Spin-coat zinc acetate solution on the conductive substrate 22 and thermally decompose it to prepare ZnO seed crystals, and use a hydrothermal reaction kettle to further grow ZnO nanorods in the zinc acetate-hexamethylenetetramine solution to obtain regular growth ZnO nanorod arrays 23 .
[0044] Step 2: Deposit a metal palladium film 21 on the upper end of the ZnO nanorod array with a thickness of 10-50 nm by using vacuum coating equipment.
[0045] Step 3: Use a dicing machine to scribe to obtain the hydrogen sensor piezoelectric chip 2 .
[0046] Step 4: Put the hydrogen sensor piezoelectric chip 2 into the package housing 11 , seal the edge of the housing by laser welding technology, and obtain the piezoelectric hydrogen sensor 1 .
Embodiment 3
[0048] The invention provides a specific method for measuring hydrogen by a piezoelectric hydrogen sensor, as shown in the attached image 3 shown, including:
[0049] Step 1: Connect the two gold electrodes 13 and 14 of the piezoelectric hydrogen sensor 1 to the I / O terminals of the filter circuit 31 on the transmitter 3 respectively;
[0050] Step 2: Put the piezoelectric hydrogen sensor 1 or the transmitter 3 into the test cavity;
[0051]Step 3: The piezoelectric hydrogen sensor 1 is a passive device that outputs direct current externally, and does not need power from the transmitter 3 during operation. When there is hydrogen in the environment, the hydrogen enters the inside of the hydrogen sensor piezoelectric chip 2 through the vent hole 12, and is limited by the package housing 11. After the metal palladium film 21 absorbs the hydrogen, the volume expands longitudinally, extruding the ZnO nanorod array 23, as attached figure 2 As shown, the output voltage of the pi...
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