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A nanometer multi-layer AlTiN/MoVCuN coating and a preparing method and applications thereof

A nano-multi-layer and coating technology, applied in coating, metal material coating process, ion implantation plating, etc., can solve the problems of easy volatilization, lower high temperature wear resistance, lower high temperature wear resistance, etc., and achieve surface Smooth, structured effect

Active Publication Date: 2018-12-04
GUANGDONG UNIV OF TECH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

However, the low tribological properties of MoN coatings are basically limited to the temperature range below 500 °C due to the high temperature of MoO 3 The oxide phase is unstable and easy to volatilize, resulting in reduced high temperature wear resistance
while V 2 o 5 The melting point temperature is lower between 670°C and 685°C, which greatly reduces the wear resistance at high temperatures

Method used

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  • A nanometer multi-layer AlTiN/MoVCuN coating and a preparing method and applications thereof
  • A nanometer multi-layer AlTiN/MoVCuN coating and a preparing method and applications thereof
  • A nanometer multi-layer AlTiN/MoVCuN coating and a preparing method and applications thereof

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0030] A nano-multilayer AlTiN / MoVCuN coating, which includes a substrate base, a Cr bombardment implant layer, a CrN transition layer, and a nano-multilayer AlTiN / MoVCuN coating from bottom to top; a nano-multilayer AlTiN / MoVCuN coating It is formed by alternate deposition of AlTiN intermediate layer and MoVCuN intermediate layer with a modulation ratio of 3:2, and the modulation period is 0.6-2.4nm; the atomic percentage content of each element in the nano-multilayer AlTiN / MoVCuN coating is: Al 10.6at. %, Ti 7.0at.%, Mo 28.8at.%, V5.8at.%, Cu 1.4at.%, N 46.4at.%.

[0031] The preparation method follows the steps below:

[0032] (1) Fix the pretreated substrate base on the workpiece turret in the coating chamber, so that the base is facing the target surface, the distance between the target and the base is 120cm, adjust the rotation speed of the turret to 3rpm, and the revolution speed to 1rpm, and turn on the heater Raise the temperature to 200°C, pre-pump the background va...

Embodiment 2

[0040] A nano-multilayer AlTiN / MoVCuN coating, which includes a substrate base, a Cr bombardment implant layer, a CrN transition layer, and a nano-multilayer AlTiN / MoVCuN coating from bottom to top; a nano-multilayer AlTiN / MoVCuN coating It is formed by alternate deposition of AlTiN interlayer and MoVCuN interlayer with a modulation ratio of 3:2, and the modulation period is 0.6-2.4nm; the atomic percentage content of each element in the nano-multilayer AlTiN / MoVCuN coating is: Al 10.9at. %, Ti 6.7at.%, Mo 29.2at.%, V5.6at.%, Cu 1.0at.%, N 46.6at.%.

[0041] The preparation method follows the steps below:

[0042] (1) Fix the pretreated substrate base on the workpiece turret in the coating chamber so that the base is facing the target surface, the distance between the target and the base is 120cm, adjust the rotation speed of the turret to 3rpm, and the revolution speed to 2rpm, and turn on the heater Raise the temperature to 200°C, pre-pump the background vacuum to 5.0×10 -...

Embodiment 3

[0050] A nano-multilayer AlTiN / MoVCuN coating, which includes a substrate base, a Cr bombardment implant layer, a CrN transition layer, and a nano-multilayer AlTiN / MoVCuN coating from bottom to top; a nano-multilayer AlTiN / MoVCuN coating It is formed by alternate deposition of AlTiN interlayer and MoVCuN interlayer with a modulation ratio of 3:2, and the modulation period is 0.6-2.4nm; the atomic percentage content of each element in the nano-multilayer AlTiN / MoVCuN coating is: Al 11.4at. %, Ti 6.7at.%, Mo 27.3at.%, V5.8at.%, Cu 0.4at.%, N 48.4at.%.

[0051] The preparation method follows the steps below:

[0052] (1) Fix the pretreated substrate base on the workpiece turret in the coating chamber, so that the base is facing the target surface, the distance between the target and the base is 120cm, adjust the rotation speed of the turret to 3rpm, and the revolution speed to 3rpm, and turn on the heater Raise the temperature to 200°C, pre-pump the background vacuum to 5.0×10 ...

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Abstract

The invention belongs to the technical field of preparation of cutter coatings and surface protective coatings, and discloses a nanometer multi-layer AlTiN / MoVCuN coating and a preparing method and applications thereof. The coating includes, from bottom to top, a substrate matrix, a Cr bombardment implanted layer, a CrN transition layer and a nanometer multi-layer AlTiN / MoVCuN coating formed by alternative deposition of AlTiN middle layers and MoVCuN middle layers in a ratio of 3:2 with a modulation period being 0.6-2.4 nm. Nanometer multi-layer and nanometer composite structures are combinedto design a nanometer multi-layer lubricating hard coating, a multi-layer multi-component nanometer composite coating prepared by a bipolar pulse magnetron sputtering deposition technique assisted bya positive electrode layer ionic source is adopted, and the disclosed coating has smooth surfaces, a compact structure, a low friction coefficient, and a self-lubricating effect.

Description

technical field [0001] The invention belongs to the technical field of preparation of tool coatings and surface protection coatings, and in particular relates to a nanometer multilayer AlTiN / MoVCuN coating and a preparation method and application thereof. Background technique [0002] By adding a reinforcing phase to the matrix phase, the ternary or multi-element transition metal nitride coating is formed by nanocomposite, which helps to improve the hardness and high temperature oxidation resistance of the coating, and prepares a hard coating with good wear resistance. coating. For example, the reinforcement phase TiAlN coating is developed on the basis of the binary TiN coating. Due to the solid solution strengthening effect of Al, the hardness of the coating is greatly improved, and a layer of dense Al is easy to form on the surface of the TiAlN coating at high temperature. 2 o 3 The protective film inhibits the in-diffusion of O and the out-diffusion of Ti, thereby impr...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C23C14/35C23C14/32C23C14/06C23C14/16
CPCC23C14/0036C23C14/0641C23C14/16C23C14/325C23C14/352
Inventor 王启民梅海娟王瑞张腾飞
Owner GUANGDONG UNIV OF TECH
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