Supercharge Your Innovation With Domain-Expert AI Agents!

Preparation method for tungsten hexafluoride and reactor thereof

A tungsten hexafluoride and reactor technology, which is applied in the field of tungsten hexafluoride preparation, can solve problems such as unsuitable carbon-containing materials, and achieve the effects of compact structure, stable reaction process, and high utilization rate of fluorine gas

Inactive Publication Date: 2018-12-07
LIMING RES INST OF CHEM IND
View PDF6 Cites 2 Cited by
  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, the carbonaceous material prepared by this process is not suitable for use in the environment of high fluorine gas concentration, and needs to be replaced regularly, which is more suitable for the deep purification of high-purity WF6

Method used

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
View more

Image

Smart Image Click on the blue labels to locate them in the text.
Viewing Examples
Smart Image
  • Preparation method for tungsten hexafluoride and reactor thereof
  • Preparation method for tungsten hexafluoride and reactor thereof

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0026] The reactor is made of Monel material, the inner diameter of the reactor is 100mm, and the length of the two-stage reactor is 1000mm. High-purity tungsten blocks are used as raw materials, the tungsten content is greater than 99.5%, the length is 40-50mm, and the diameter is 10mm. After drying, add 0.5kg of petroleum coke to the reactor, and the fluorine gas is obtained by electrolytic purification, containing about 50ppmv of HF and other impurities, and the fluorine gas is continuously introduced at a superficial gas velocity of 0.03m / s In reaction zone 1, the average residence time is 100s. Reaction zone 2 is filled with 5kg of nickel wire and 50kg of tungsten block, and the outlet temperature of cooling water is controlled at 40°C. Reaction zone 2 is controlled by an electric heating system to control the temperature in the reactor to 350±20°C. Analyze the composition of crude gas products generated by the reaction. The device was operated for 48 hours, the reactio...

Embodiment 2

[0028] The reactor is the same as in Example 1, and no metal catalyst is added in the reactor 2, and the others are the same as in Example 1. A total of 173.5 kg of crude material is collected.

Embodiment 3

[0030] The reactor is made of nickel material, and the structure is the same as in Example 1. High-purity tungsten blocks are used as raw materials, the tungsten content is greater than 99.5%, the length is 40-50mm, and the diameter is 10mm. After drying, add 0.5kg of charcoal to the reactor, fluorine gas is obtained by electrolytic purification, contains about 80ppmv of HF and other impurities, and continuously feeds fluorine gas into the reaction at a superficial gas velocity of 0.05m / s Zone 1, the average residence time is 80s. The reaction zone 2 is filled with 1kg of copper wire and 100kg of tungsten blocks, and the outlet temperature of the cooling water is controlled at 60°C. The reaction zone 2 is controlled by an electric heating system to control the temperature inside the reactor at 400±20°C. Analyze the composition of crude gas products generated by the reaction. The device was operated for 48 hours, the reaction was stopped, and a total of 292.1 kg of crude mate...

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More

PUM

No PUM Login to View More

Abstract

The invention discloses a preparation method for tungsten hexafluoride and a reactor thereof. The preparation is carried out in a vertical tubular reactor. The reactor is divided into upper and lowerreaction zones; a raw material tungsten block in a reaction zone 1 reacts with high-purity fluorine under the action of a solid igniting agent; a reaction gas enters into a reaction zone 2 and furtherreacts with the tungsten block and a metal catalyst in the reaction zone 2; after reaction, the reaction efficiency of fluorine can reach up to above 95%; the reaction zone 1 is located on the upperpart of the reactor, the reaction zone 2 is located on the lower part of the reactor and a dust collecting zone is located on the bottom of the reactor; a fluorine inlet (1) and an upper charging port(2) are formed in the upper part of the reaction zone 1; an upper sieve plate (4) is arranged on the bottom of the reaction zone 1; a cooling jacket is arranged on the exterior of the reaction zone 1; a middle charging port (3) is formed in the upper part of the reaction zone 2 and a gas outlet 7 is formed in the lower part of the reaction zone 2; a lower sieve plate (5) is arranged on the bottomof the reaction zone 2; a heating system (8) is arranged on the exterior of the reaction zone 2. The method is high in fluorine reaction efficiency, simple in process control and suitable for industrial production.

Description

technical field [0001] The invention relates to the preparation technology of tungsten hexafluoride. Background technique [0002] Tungsten hexafluoride is a gas used in the electronics industry. It is mainly used as a raw material for metal tungsten chemical vapor deposition (CVD) and atomic layer deposition (ALD) processes. WF 6 WSi 2 Can be used as wiring material in large scale integration (LSI). Composite coatings of tungsten and rhenium can also be prepared by mixed metal CVD process, which can be used in the manufacture of X-ray emitting electrodes and solar absorbers. [0003] Patent document CN101070189 discloses a method for preparing tungsten hexafluoride gas. Fluorine gas and high-purity nitrogen are mixed in a ratio of 1:0.5-20 and fed into a cracker. The preheating temperature is 10-100°C and the pressure is 0-20. 0.6MPa, the time is 1min~20min, and then enters the reactor, there are 5~15Kg raw material tungsten in the reactor, the reaction temperature of fl...

Claims

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More

Application Information

Patent Timeline
no application Login to View More
IPC IPC(8): C01G41/04B01J19/00B01J19/24
CPCB01J19/0013B01J19/0053B01J19/242C01G41/04
Inventor 李贤武张金彪许福胜吴旭飞李金勇汤月贞
Owner LIMING RES INST OF CHEM IND
Features
  • R&D
  • Intellectual Property
  • Life Sciences
  • Materials
  • Tech Scout
Why Patsnap Eureka
  • Unparalleled Data Quality
  • Higher Quality Content
  • 60% Fewer Hallucinations
Social media
Patsnap Eureka Blog
Learn More

Browse by: Latest US Patents, China's latest patents, Technical Efficacy Thesaurus, Application Domain, Technology Topic, Popular Technical Reports.

© 2025 PatSnap. All rights reserved.Legal|Privacy policy|Modern Slavery Act Transparency Statement|Sitemap|About US| Contact US: help@patsnap.com