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A production device and method for electronic grade phosphorus pentoxide

A technology of phosphorus pentoxide and electronic grade, which is applied in the field of production equipment of electronic grade phosphorus pentoxide, can solve the problems of high equipment requirements, large impact on product quality, large equipment impact, etc., and achieves good quality stability and process technology. Easy-to-control, mild combustion response

Active Publication Date: 2021-11-12
JINGYI SCI & TECH GUIYANG
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

In the production of these several patented methods, yellow phosphorus reacts violently in excess oxygen, and can only be carried out in a combustion tower, which requires high equipment, is greatly affected by equipment, and has a great impact on product quality.

Method used

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  • A production device and method for electronic grade phosphorus pentoxide

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0022] Example 1 Production device of electronic grade phosphorus pentoxide

[0023] Such as figure 1 The production device of the electronic grade phosphorus pentoxide consists of a primary reactor 2, a temperature controller 3, a heater 1, a secondary reactor 10, a large flow fan 13, a condenser 16, a receiver 18 and a dryer 20. , wherein: the primary reactor 2 is placed in the heater 1, one end of the primary reactor 2 is connected to a purified oxygen intake pipe with air pressure regulating valves 4 and 6 and flow control, and the other end is connected to the one-way control valve 8 and then connected The secondary reactor 10; the secondary reactor 10 is provided with two gas inlets and a gas outlet, and the two gas inlets are respectively connected with the inert gas inlet pipe and the gas outlet pipe of the primary reactor 2 with a one-way control valve 8. The air port is connected to the large-flow fan 13, and the outlet end of the large-flow fan 13 is connected to t...

Embodiment 2

[0026] Embodiment 2 Using the production device of Embodiment 1, first use purified nitrogen to remove the air in the equipment, and prepare electronic grade phosphorus pentoxide according to the following steps:

[0027] (1) Transfer 1.5kg of liquid high-purity yellow phosphorus with a purity of 6N to the primary reactor 2 by siphon, cover it with ultra-high-purity water, open the pipeline valve 11 and exhaust valve 14 in the device, and run the large-flow fan 13, At the same time, adjust the temperature controller 3 to control the heater 1 to heat the primary reactor at 105°C until the trace water in the pure water and yellow phosphorus evaporates completely and then stop heating;

[0028] (2) Open the secondary reactor inlet valve 9, the secondary reactor outlet valve 12 and the receiving valve 15, close the exhaust valve 14 and the pipeline valve 11 in the device; open the A air pressure regulating valve 4 and B air pressure on the intake pipe Regulating valve 6, the high-...

Embodiment 3

[0034] Embodiment 3 Using the production device of Embodiment 1, first use purified argon to remove the air in the equipment, and prepare electronic grade phosphorus pentoxide according to the following steps:

[0035](1) Transfer 2 kg of liquid high-purity yellow phosphorus with a purity of 6N to the primary reactor 2 by siphon, cover it with ultra-high-purity water, open the pipeline valve 11 and exhaust valve 14 in the device, and run the large-flow fan 13, and at the same time Adjust the temperature controller 3 to control the heater 1 to heat the primary reactor at 110°C until the trace water in the pure water and yellow phosphorus evaporates completely and then stop heating;

[0036] (2) Open the secondary reactor inlet valve 9, the secondary reactor outlet valve 12 and the receiving valve 15, close the exhaust valve 14 and the pipeline valve 11 in the device; open the A air pressure regulating valve 4 and B air pressure on the intake pipe Regulating valve 6, the high-pu...

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Abstract

A production device and method for electronic grade phosphorus pentoxide, the device is composed of a primary reactor, a temperature controller, a heater, a secondary reactor, a large flow fan, a condenser, a material receiver and a dryer; the method is : (1) Use nitrogen to clear the air in the equipment, put high-purity yellow phosphorus in the first-stage reactor, cover it with ultra-high-purity water, and heat the reactor until the water evaporates completely; (2) Pass high-purity oxygen into the first-stage reactor Combustion reaction with yellow phosphorus in the reactor; (3) Pass high-purity oxygen into the secondary reactor, continue the full oxidation reaction, and collect high-purity phosphorus pentoxide product. The invention adopts the production process of mainly generating phosphorus trioxide and then converting it into phosphorus pentoxide, the combustion reaction is mild, and the process is easy to control; the sealed production device made of high-purity quartz is not affected by the environment, and the product purity can be stable It reaches 6N level, the product has high purity and good quality stability. It is suitable for preparing electronic-grade phosphorus pentoxide with high-purity yellow phosphorus.

Description

technical field [0001] The present invention relates to oxides of phosphorus, more specifically, to phosphorus pentoxide, and specifically, to a production device and process for electronic-grade phosphorus pentoxide. Background technique [0002] High-purity electronic grade phosphorus pentoxide is widely used in the semiconductor industry and optoelectronics industry as a dopant source for semiconductor phosphorus sources, or for the production of optical or heat-resistant glass, or as raw materials for the manufacture of high-purity phosphide products. [0003] At present, the method for producing high-purity phosphorus pentoxide in China is mainly obtained by direct combustion of yellow phosphorus in sufficient oxygen or air. In the domestic production technology, patent CN 101979310 B discloses "a kind of 99.9999% phosphorus pentoxide "Production method" is to burn in the tray-type phosphorus burning area in the combustion tower by controlling the excess flow rate of 8-...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): C01B25/12
CPCC01B25/12C01P2006/80
Inventor 舒骁骥赵永胜潘先伟周加规徐虎游苹
Owner JINGYI SCI & TECH GUIYANG
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