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Method to prepare nanometer material based on Airy light field of surface plasmons

A technology of surface plasmons and nanomaterials, applied in the direction of nanotechnology, nanotechnology, nanotechnology, etc. for materials and surface science, can solve the problem of increasing the complexity of lithography process, difficulty in reaching mass production level, lithography Problems such as huge cost, to achieve the effect of easy operation, convenient use and high integration

Inactive Publication Date: 2019-01-11
EAST CHINA NORMAL UNIV
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Problems solved by technology

With the reduction of feature size, shorter wavelength extreme ultraviolet lithography is required, which makes traditional lithography costly and difficult to achieve mass production level; in order to correct the optical proximity effect caused by diffraction limit, paraxial illumination and phase shift mask are introduced Technology adds complexity to photolithography process

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  • Method to prepare nanometer material based on Airy light field of surface plasmons
  • Method to prepare nanometer material based on Airy light field of surface plasmons
  • Method to prepare nanometer material based on Airy light field of surface plasmons

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Embodiment 1

[0057] The specific implementation of the present invention mainly includes the following steps:

[0058] Step (1) Realize Avery Beam

[0059] Airy beams have the characteristics of non-diffraction, self-acceleration, and self-healing in the process of propagating in free space. In the field of optics, a one-dimensional Airy beam satisfies the Schrödinger equation in the paraxial approximation:

[0060]

[0061] The Airy function solution can be obtained by bringing the initial distribution of the electric field wave packet of the Airy beam in the ideal state:

[0062] φ(ξ,s)=Ai(s-(ξ / 2) 2 )exp[i(sξ / 2)-i(ξ 3 / 12)]

[0063] Among them, φ is the electric field wave packet, s=x / x 0 Represents the dimensionless reduced abscissa, x 0 is a one-dimensional space coordinate factor, Indicates the normalized propagation distance.

[0064] In theory, due to the non-diffraction characteristics of the Airy beam, it has infinite energy, so its sidelobe attenuation is very slow, bu...

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Abstract

The invention discloses a method to prepare a nanometer material based on Airy light field of surface plasmons. The method includes: first, exciting Airy beam on SPP; then, coupling the laser in the free space to a metal surface by using one-dimensional double slits on the metal surface, to form SPP waves transmitted in various direction along the surface; forming a tunable light field by two SPPwaves transmitted face to face on a metal surface between two double-slits structures, the tunable light field being a nano lens array, and incident cold molecular beam focusing on the effect of the tunable light field, thereby depositing on the metal surface in a resolution of nanoscale, to obtain a nanometer material. The invention is easy to control, move or modify, convenient to use and high in integration.

Description

technical field [0001] The invention relates to the fields of nonlinear optics and surface molecular deposition, in particular to a method for preparing nanomaterials based on the Avery light field of surface plasmons. Background technique [0002] With the introduction of Moore's Law and the rapid development of technology, electronic devices have developed rapidly in the past few decades, and the feature size has become smaller and smaller. However, this law that dominates the microelectronics industry is facing the danger of failure. The main problem is how to break through Diffraction limit, for which plasmonic photonics offers a solution. Plasmonics is an emerging discipline that studies the optical properties of metal nanostructures and their applications. With the advancement of nanotechnology, the subject has developed rapidly in recent years. Among them, surface plasmons are a research direction that has attracted much attention. It has important application prosp...

Claims

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Application Information

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IPC IPC(8): G02B5/00B82Y30/00
CPCB82Y30/00G02B5/008
Inventor 李晓敏李致健栾天万嘉昕金豫
Owner EAST CHINA NORMAL UNIV
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