Broadband terahertz wave modulator, preparation method and broadband terahertz wave modulation system
A terahertz wave and modulation system technology, applied in the terahertz field, can solve problems such as high pump optical power, device thermal damage, and large insertion loss, and achieve the effects of simple preparation process, large modulation depth, and large modulation depth
- Summary
- Abstract
- Description
- Claims
- Application Information
AI Technical Summary
Problems solved by technology
Method used
Image
Examples
Embodiment 1
[0033] The invention provides a preparation method of a broadband terahertz wave modulator. The preparation method comprises: using a glue spreader to spin-coat a layer of phase-change material vanadium dioxide film on the front and back of a double-sided polished high-resistance silicon substrate, The preparation process specifically includes the following steps:
[0034] 1. Select a double-sided polished high-resistance silicon wafer with a thickness of 300μm-700μm and a resistance value greater than 3000 ohms. The cm size is 1cm*1cm as the substrate.
[0035] 2. Put the double-sided polished high-resistance silicon wafer into the ultrasonic cleaning machine for 5-10 minutes.
[0036] 3. Put the cleaned high-resistance silicon wafer into the drying box and heat it for 15-20 minutes to dry the sample.
[0037] 4. Put the dried high-resistance silicon wafer on the glue homogenizer, turn on the vacuum pump to absorb the sample, and drop a drop of vanadium dioxide solution on t...
Embodiment 2
[0044] The present invention also provides a broadband terahertz wave modulator prepared by the method described in the first embodiment.
Embodiment 3
[0046] To achieve the above and other related objectives, the present invention also provides a broadband terahertz wave modulation system, which includes a first laser emitter, a second laser emitter, a terahertz wave emitter and the aforementioned modulator,
[0047] The first laser emitter emits a first laser beam to irradiate one side of the modulator and forms a first spot;
[0048] The second laser emitter emits a second laser beam to irradiate the other side of the modulator and form a second spot;
[0049] The terahertz wave emitter emits a terahertz wave incident on one side of the modulator and forms a third light spot;
[0050] The third light spot at least partially overlaps with the first light spot or the second light spot.
[0051] where the modulator is placed vertically as figure 1 The terahertz wave is shown propagating in the optical path.
[0052] In one embodiment, the first laser beam and the second laser beam are respectively incident on the two surfa...
PUM
| Property | Measurement | Unit |
|---|---|---|
| Thickness | aaaaa | aaaaa |
| Thickness | aaaaa | aaaaa |
| Thickness | aaaaa | aaaaa |
Abstract
Description
Claims
Application Information
Login to View More 

