A Thin Film Temperature Sensor for Aeroengine Turbine Blades
A thin-film temperature sensor technology, which is applied in the field of temperature measurement technology and sensors, can solve problems such as long response time, damage to the structure of turbine blades, and the influence of target temperature field distribution, and achieve the effect of solving high-temperature insulation of the film layer and improving adhesion strength
Active Publication Date: 2020-12-08
AVIC SHANGHAI AERONAUTICAL MEASUREMENT CONTROLLING RES INST
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Problems solved by technology
The traditional thermocouple temperature measurement method can only measure the temperature after the measured object and the temperature sensor reach thermal equilibrium, and has a long response time. It is not suitable for measuring the temperature of fast-changing temperature or small targets, and will cause damage to the structure of the turbine blade. , has a certain influence on the distribution of the target temperature field
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[0040] In order to better understand the technical content of the present invention, specific embodiments are given together with the attached drawings for description as follows.
[0041] The thin film temperature sensor uses ion sputtering and patterning technology to directly fabricate a functional and structurally integrated thin film thermocouple on the surface of the turbine blade, which is an advanced temperature measurement technology. Thin film sensors have the advantages of thin structure, small heat capacity, fast response time, and little impact on the test environment, and do not require special processing and sensor fixing methods, will not damage the test structure, have little impact on the physical properties of the test object, and have pressure resistance. , heat resistance, thermal shock resistance and anti-stripping performance.
[0042] combine Figure 1-2 , the sensor of the present invention includes a multi-layer film layer 2 , a connection point 4 of a...
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Abstract
The invention discloses a thin-film temperature sensor for an aeroengine turbine blade, which comprises a transition layer, a thermal growth layer, an insulating layer and a thermocouple layer connected in sequence, and the thermocouple layer is composed of a first thermocouple and a second thermocouple through one end The overlapping part constitutes the hot junction, that is, the measuring end. The leading wire is made of filaments of the same quality as the first thermocouple and the second thermocouple, and is respectively connected to the first thermocouple and the second thermocouple through high-temperature conductive glue. The thermocouple is connected at the other end. Aiming at the high-temperature and harsh environment of the aero-engine, the invention designs the film layer structure of the sensor, optimizes the thin-film sputtering, annealing and other preparation processes, and uses the ion deposition technology to directly deposit multi-layer films on the surface of the turbine blades to integrate the preparation function and structure The thin-film sensor improves the adhesion strength between the film layers and solves the problems of high-temperature insulation, shedding, and signal extraction of the film layer. The total thickness of the thin-film sensor of the present invention is less than 25um, and the highest measurement temperature is 1100°C.
Description
technical field [0001] The invention belongs to the field of temperature measurement technology and sensor technology, and in particular relates to a thin film temperature sensor for high temperature measurement and a preparation method thereof. Background technique [0002] With the development of aerodynamic technology, the temperature of the engine continues to increase, resulting in a substantial increase in the temperature borne by the turbine blades, which directly affects the reliable working life of the turbine blades at high temperatures, making accurate measurement of the temperature of hot components such as turbine blades an important task. The key issue. Accurate measurement of turbine blade temperature helps to verify cooling efficiency as well as performance of thermal barrier coatings and prevent over-temperature damage of turbine blades. Accurately measuring the surface temperature of hot-end parts plays an important role in correctly evaluating its cooling...
Claims
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IPC IPC(8): C23C14/02C23C16/40C23C14/35C23C14/58C23C4/11C23C14/54G01K7/02
CPCG01K7/02C23C4/11C23C14/022C23C14/35C23C14/542C23C14/5806C23C16/403
Inventor 顾宝龙陈浩远常斌黄建民
Owner AVIC SHANGHAI AERONAUTICAL MEASUREMENT CONTROLLING RES INST