An improved microring resonator with coupling region and its manufacturing method

Abstract

The invention provides a microring resonator with an improved coupling region and a manufacturing method thereof, belonging to the field of integrated optics. The device includes a substrate 1, a bonding layer 2, a straight waveguide 4, a dielectric layer 6, and a racetrack waveguide 7, the bonding layer 2 is disposed above the substrate 1, and the dielectric layer 6 is disposed above the bonding layer 2 , the straight waveguide 4 is arranged in the dielectric layer 6, the straight part of the racetrack waveguide 7 is directly above the straight waveguide 4, and it is characterized in that it also includes a buried trench 3, and the buried trench 3 is arranged in the coupling region In the bonding layer 2 and directly below the straight waveguide 4 , the refractive index of the buried trench 3 is smaller than that of the substrate 1 . The buried groove structure adopted in the present invention can not only reduce the leakage loss of the light field in the transmission process, but also promote the transfer of the light field to other media, thereby improving the coupling efficiency, and can also promote the mode from multi-mode to medium in the ridge waveguide. Schemas reduce the advantage of making changes.

Description

technical field [0001] The invention belongs to the field of integrated optics, and in particular relates to a device structure of a microring resonant cavity with an improved coupling region and a related manufacturing method. Background technique [0002] Integrated optics is one of the frontiers in the field of optics and optoelectronics. Its main research contents include collimation, deflection, filtering, space radiation, optical oscillation, conduction, amplification, modulation of light waves in thin film materials and related thin films. Nonlinear optical effects of materials, etc. In recent years, with the development of micromachining technologies such as ion beam implantation, direct bonding, and focused ion beam etching, the deepening of optoelectronics research, and the discovery of materials with various optical properties, integrated optics is gradually becoming mature. In 1969, Marcatili[1] and others proposed a microring resonator and simulated a bandpass ...

AI Technical Summary

Problems solved by technology

[0003] At present, although microring resonators have been realized in different materials such as SOI (Silicon-On-Insulator, silicon on an insulating substrate), organic polymers, and lithium niobate, their iconic parameters such as loss and modulation depth , free spectral range, quality factor, etc., there is still a lot of room for improvement

In addition, most microring resonators use a horizontal coupling structure. In terms of coupling spacing, for devices using horizontal coupling, the general coupling spacing is about 200nm. From the perspective of process implementation, the coupling spacing of horizontal coupling is narrow. The precision is difficult to meet the requirements, and the cost of more advanced lithography technology is too high

The resonator using the vertical coupling structure is also faced with the problem that the surface of each layer cannot be flat on the multi-layer structure, which will aggravate the problem of device loss, which offsets the advantages brought by the use of the vertical coupling structure, and also faces difficulties in application.

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