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Cold spraying preparation technology of aluminum rotating target material and product

A preparation process, cold spraying technology, applied in metal material coating process, coating, ion implantation plating, etc., to achieve the effect of reducing oxidation and impurity intrusion, improving density and high bonding strength

Inactive Publication Date: 2019-04-02
NINGBO INST OF MATERIALS TECH & ENG CHINESE ACADEMY OF SCI
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0008] But at present, there is no report on the preparation of high-purity aluminum coating directly on the surface of the substrate by cold spraying process.

Method used

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  • Cold spraying preparation technology of aluminum rotating target material and product

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0050] 1) Preparation of stainless steel back tube:

[0051] Cutting: use a sawing machine to saw a 304 stainless steel pipe of a specified length, the inner diameter of the steel pipe is 125mm, and the outer diameter is 133mm;

[0052] Car pipe: Carve out grooves, bevels, etc. at both ends of the stainless steel pipe according to the product drawings;

[0053] Surface roughening by sandblasting: the surface of the stainless steel pipe is then sandblasted by a sandblasting machine; the sandblasting material is brown corundum with a particle size of 80 mesh, the sandblasting angle is 30 degrees, and the air compressor pressure is 0.8MPa. After roughening, the roughness (Ra) of the stainless steel is controlled to be 100 microns.

[0054] 2) Aluminum target preparation:

[0055] Drying: Dry the aluminum powder (spherical powder, particle size 500-250 mesh) in a drying oven at 80°C for 2 hours;

[0056] Cold spraying: The initial vacuum degree in the cold spraying chamber 2 is...

Embodiment 2

[0060] 1) Preparation of stainless steel back tube:

[0061] Cutting: use a sawing machine to saw a 304 stainless steel pipe of a specified length, the inner diameter of the steel pipe is 125mm, and the outer diameter is 133mm;

[0062] Car pipe: Carve out grooves, bevels, etc. at both ends of the stainless steel pipe according to the product drawings;

[0063] Surface roughening by sandblasting: the surface of the stainless steel pipe is then sandblasted by a sandblasting machine; the sandblasting material is brown corundum with a particle size of 80 mesh, the sandblasting angle is 45 degrees, and the air compressor pressure is 0.8MPa. After roughening, the roughness (Ra) of stainless steel is controlled to 60 microns;

[0064] 2) Aluminum target preparation:

[0065] Drying: Dry the aluminum powder (spherical powder, particle size 500-250 mesh) in a drying oven at 80°C for 3 hours;

[0066] Cold spraying: The initial vacuum degree in the cold spraying chamber 2 is control...

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Abstract

The invention discloses a cold spraying preparation technology of an aluminum rotating target material. By taking aluminum powder as a spraying powder raw material, cold spraying is conducted througha helium circulating cold-spraying system; the cold spraying technology specifically comprises the steps that a cold spraying chamber is vacuumized to 0 to 500 Pa, the aluminum powder is conveyed intothe cold-spraying system, compressed helium is utilized as working gas, the aluminum powder is driven to collide a substrate placed in the cold spraying chamber, and the aluminum powder is depositedon the surface of the substrate to form a dense coating; the non-deposited aluminum powder enters a filtering system along with the helium, the filtered helium enters a gas pressurization system to bepressurized to return to the cold-spraying system again, and the non-deposited aluminum powder is collected and screened to be reused; and in the cold spraying process, the pressure in the cold spraying chamber is controlled to be maintained within 5000 to 20000 Pa. The cold spraying preparation technology of the aluminum rotating target material is simple, the bonding strength of the aluminum coating and the substrate is high, and a transition layer is not needed.

Description

technical field [0001] The invention relates to the field of target material preparation, in particular to a cold spraying preparation process of an aluminum rotating target material and a product thereof. Background technique [0002] High-purity aluminum usually refers to aluminum with a purity (aluminum content) greater than 99.8%. High-purity aluminum targets are indispensable coating materials for the thin-film transistor (TFT) industry, and are used for plating conductive layer films on glass substrates. At present, the high-purity aluminum target used by most magnetron sputtering coating manufacturers is a planar target, and its material utilization rate is very low, and only about 20% of the total mass is used; correspondingly, high-purity aluminum The utilization rate of the rotating target can reach about 75%. Moreover, if the life of the target is measured by KW·h, the life of the rotating target is about 5 times longer than that of the plane target. In addition...

Claims

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Application Information

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IPC IPC(8): C23C14/35C23C24/04
CPCC23C14/3414C23C14/35C23C24/04
Inventor 所新坤黄晶周平刘奕凤晓华陈秀勇张波涛李华
Owner NINGBO INST OF MATERIALS TECH & ENG CHINESE ACADEMY OF SCI